OSA's Digital Library

Journal of the Optical Society of America A

Journal of the Optical Society of America A


  • Vol. 5, Iss. 8 — Aug. 1, 1988
  • pp: 1270–1280

Optical microscope imaging of lines patterned in thick layers with variable edge geometry: theory

Diana Nyyssonen and Chris P. Kirk  »View Author Affiliations

JOSA A, Vol. 5, Issue 8, pp. 1270-1280 (1988)

View Full Text Article

Enhanced HTML    Acrobat PDF (2618 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



A monochromatic waveguide model that can predict the optical microscope images of line objects with arbitrary edge geometry is presented. The lines may be patterned in thick layers, including multilayer structures with sloping, curved, and undercut edges; granular structures such as lines patterned in polysilicon; and asymmetric objects. The model is used to illustrate the effects of line edge structure on the optical image. Qualitative agreement with experimentally obtained optical image profiles is demonstrated. Application of the model to studying the effects of variations in layer thickness and edge geometry on linewidth measurements made at different stages of manufacturing integrated-circuit devices is discussed.

© 1988 Optical Society of America

Original Manuscript: November 9, 1987
Manuscript Accepted: March 28, 1988
Published: August 1, 1988

Diana Nyyssonen and Chris P. Kirk, "Optical microscope imaging of lines patterned in thick layers with variable edge geometry: theory," J. Opt. Soc. Am. A 5, 1270-1280 (1988)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. M. Born, E. Wolf, Principles of Optics, 5th ed. (Pergamon, Oxford, 1975), pp. 522–532.
  2. L. C. Martin, The Theory of the Microscope (Blackie, London, 1966), Chaps. V and VIII.
  3. D. Nyyssonen, “Theory of optical edge detection and imaging of thick layers,” J. Opt. Soc. Am. 72, 1425–1436 (1982), [CrossRef]
  4. See Ref. 1, Sec. 13.5, pp. 633–664.
  5. P. W. Barber, D. Y. Wang, M. B. Long, “Scattering calculations using a microcomputer,” Appl. Opt. 20, 1121–1123 (1981). [CrossRef] [PubMed]
  6. J. P. Hugonin, R. Petit, “Theoretical and numerical study of a locally deformed stratified medium,”J. Opt. Soc. Am. 71, 664–674 (1981). [CrossRef]
  7. R. Petit, ed., Electromagnetic Theory of Gratings (Springer-Verlag, Berlin, 1980). [CrossRef]
  8. K. A. Zaki, A. R. Neureuther, “Scattering from a perfectly conducting surface with sinusoidal height profile, TE polarization,”IEEE Trans. Antennas Propag. AP-19, 208–214 (1971). [CrossRef]
  9. J. P. Hugonin, R. Petit, M. Cadilhac, “Plane-wave expansions used to describe the field diffracted by a grating,”J. Opt. Soc. Am. 71, 593–598 (1981). [CrossRef]
  10. See Ref. 1, p. 453.
  11. D. Nyyssonen, “Optical linewidth measurement on patterned metal layers,” in Integrated Circuit Metrology II, D. Nyyssonen, ed., Proc. Soc. Photo-Opt. Instrum. Eng.480, 65–70 (1984). [CrossRef]
  12. C. B. Burckhardt, “Diffraction of a plane wave at a sinusoidally stratified dielectric grating,”J. Opt. Soc. Am. 56, 1502–1509 (1966). [CrossRef]
  13. F. G. Kaspar, “Diffraction by thick, periodically stratified gratings with complex dielectric constant,”J. Opt. Soc. Am. 63, 37–45 (1973). [CrossRef]
  14. F. G. Kaspar, “Computation of light transmitted by a thick grating, for application to contact printing,”J. Opt. Soc. Am. 64, 1623–1630 (1974), [CrossRef]
  15. W. Magnus, S. Winkler, Hill’s Equation (Wiley, New York, 1966; Dover, New York, 1979).
  16. See Ref. 1, p. 612.
  17. See Ref. 1, p. 579.

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited