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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 6, Iss. 9 — Sep. 1, 1989
  • pp: 1343–1356

Modeling latent-image formation in photolithography, using the Helmholtz equation

H. Paul Urbach and Douglas A. Bernard  »View Author Affiliations


JOSA A, Vol. 6, Issue 9, pp. 1343-1356 (1989)
http://dx.doi.org/10.1364/JOSAA.6.001343


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Abstract

A method for simulating latent image formation in a photoresist illuminated by partially coherent light is described. The latent image is calculated by repeatedly solving a boundary-value problem for the Helmholtz equation on a two-dimensional domain, using the finite-element method. The dependence of the developed image on defocus is investigated for the case of high numerical aperture. The obtained results are compared with those predicted by the vertical propagation model and the first-order model.

© 1989 Optical Society of America

History
Original Manuscript: January 10, 1989
Manuscript Accepted: May 5, 1989
Published: September 1, 1989

Citation
H. Paul Urbach and Douglas A. Bernard, "Modeling latent-image formation in photolithography, using the Helmholtz equation," J. Opt. Soc. Am. A 6, 1343-1356 (1989)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-6-9-1343

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