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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 8, Iss. 9 — Sep. 1, 1991
  • pp: 1468–1473

Multilayer coated gratings for x-ray diffraction: differential theory

M. Nevière  »View Author Affiliations


JOSA A, Vol. 8, Issue 9, pp. 1468-1473 (1991)
http://dx.doi.org/10.1364/JOSAA.8.001468


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Abstract

A rigorous electromagnetic analysis is developed for metallic gratings covered by a stack of pairs of dielectrics and absorbers. The thicknesses of the layers can be arbitrary. In particular, they can be much thinner than the groove depth, which permits the optimization of grating efficiencies for the soft-x-ray range. The non-scalar behavior of such gratings is established for high angles of incidence. Examples of performances under near-normal and grazing incidences are given.

© 1991 Optical Society of America

History
Original Manuscript: July 9, 1990
Revised Manuscript: April 8, 1991
Manuscript Accepted: April 8, 1991
Published: September 1, 1991

Citation
M. Nevière, "Multilayer coated gratings for x-ray diffraction: differential theory," J. Opt. Soc. Am. A 8, 1468-1473 (1991)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-8-9-1468


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References

  1. T. W. Barbee, “Sputtered layered synthetic microstructure (LSM) dispersion elements,” in Low-Energy X-Ray Diagnostics 1981, D. T. Atwood, B. L. Henke, eds., Vol. 75 of the AIP Conference Proceedings (American Institute of Physics, Washington, D.C., 1981), p. 131;E. Spiller, “Reflective multilayer coatings for the far uv region,” Appl. Opt. 15, 2333–2338 (1976). [CrossRef] [PubMed]
  2. B. Vidal, P. Vincent, “Metallic multilayers for x rays using classical thin-film theory,” Appl. Opt. 23, 1794–1801 (1984). [CrossRef] [PubMed]
  3. C. Rife, W. R. Hunter, T. W. Barbee, R. G. Cruddace, “Multilayer-coated blazed grating performance in the soft x-ray region,” Appl. Opt. 28, 2984–2986 (1989). [CrossRef] [PubMed]
  4. M. Nevière, P. Vincent, R. Petit, “Sur la théorie du réseau conducteur et ses applications à l’optique,” Nouv. Rev. Opt. 5, 65–77 (1974). [CrossRef]
  5. D. Maystre, “A new general integral theory for dielectric coated gratings,” J. Opt. Soc. Am. 68, 490–495 (1978). [CrossRef]
  6. B. Vidal, P. Vincent, P. Dhez, M. Nevière, “Thin films and gratings: theories used to optimize the high reflectivity of mirrors and gratings for x-ray optics,” in Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, G. F. Marshall, ed., Proc. Soc. Photo-Opt. Instrum. Eng.563, 142–149 (1985). [CrossRef]
  7. F. Abelès, “Recherches sur la propagation des ondes électromagnétiques sinusoidales dans les milieux stratifiés. Application aux couches minces,” Ann. Phys. (Paris) 5, 596–640, 706–782 (1950).
  8. H. Berrouane, J. M. André, C. Khan Malek, S. Fouchet, F. R. Ladan, R. Rivoira, R. Barchewitz, “Fabrication and test of soft x-ray multilayer diffraction gratings,” in X-Ray/EUV Optics for Astronomy and Microscopy, Proc. Soc. Photo-Opt. Instrum. Eng. 1160, 280–285 (1989). [CrossRef]
  9. B. L. Henke, P. Lee, T. J. Tanaka, R. L. Shimabukuro, B. K. Fugikawa, “Low energy x-ray interaction coefficients: photoabsorption, scattering, and reflection,” in Vol. 27 of Atomic and Nuclear Data Tables (American Institute of Physics, New York, 1982), pp. 1–144. [CrossRef]
  10. E. G. Loewen, M. Nevière, “Simple selection rules for VUV and XUV diffraction gratings,” Appl. Opt. 17, 1087–1092 (1978). [CrossRef] [PubMed]

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