Abstract

A numerical method developed previously [J. Appl. Phys. 80, 4621 (1996)] has been extended to simulate the nonnormal-incidence reflectance-difference spectroscopy and transmittance-difference spectroscopy spectra of biaxial anisotropic $({∊}_x\ne {∊}_y\ne {∊}_z)$ multilayer systems with finite thickness. It is demonstrated that, when the principal axes of the anisotropy layer are at certain orientations, a reflectance-difference spectrum can be separated into two spectra, namely, an in-plane anisotropic spectrum and an out-of-plane anisotropic spectrum. It is shown that the separation is valid for large in-plane anisotropy, i.e., $|{∊}_x-{∊}_y|\approx |{∊}_x|,$ and an incident angle of $\le 20°.$

© 1998 Optical Society of America

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