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Journal of the Optical Society of America B

Journal of the Optical Society of America B

| OPTICAL PHYSICS

  • Editor: Henry M. Van Driel
  • Vol. 25, Iss. 7 — Jul. 1, 2008
  • pp: B20–B26

Analysis of extreme ultraviolet microscopy images of patterned nanostructures based on a correlation method

P. W. Wachulak, C. A. Brewer, F. Brizuela, C. S. Menoni, W. Chao, E. H. Anderson, R. A. Bartels, J. J. Rocca, and M. C. Marconi  »View Author Affiliations


JOSA B, Vol. 25, Issue 7, pp. B20-B26 (2008)
http://dx.doi.org/10.1364/JOSAB.25.000B20


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Abstract

A method to analyze extreme ultraviolet microscopy images of nanostructures that allows for the simultaneous determination of an object’s feature size and image resolution is presented. It is based on the correlation between the image and a set of templates of known resolution generated from the original image using Gaussian filters. The analysis was applied to images obtained with a Fresnel zone plate microscope that uses a 13.2 nm wavelength laser light for illumination. The object’s feature size and the resolution obtained with this method are shown to be in very good agreement with independent measurements of both magnitudes.

© 2008 Optical Society of America

OCIS Codes
(100.2000) Image processing : Digital image processing
(100.2960) Image processing : Image analysis
(110.0180) Imaging systems : Microscopy

ToC Category:
High-field Short Wavelengths

History
Original Manuscript: December 21, 2007
Manuscript Accepted: January 29, 2008
Published: April 7, 2008

Virtual Issues
Vol. 3, Iss. 8 Virtual Journal for Biomedical Optics

Citation
P. W. Wachulak, C. A. Brewer, F. Brizuela, C. S. Menoni, W. Chao, E. H. Anderson, R. A. Bartels, J. J. Rocca, and M. C. Marconi, "Analysis of extreme ultraviolet microscopy images of patterned nanostructures based on a correlation method," J. Opt. Soc. Am. B 25, B20-B26 (2008)
http://www.opticsinfobase.org/josab/abstract.cfm?URI=josab-25-7-B20

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