Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Function of a surface plasmon cavity for enhancing ultradeep subwavelength photolithography

Not Accessible

Your library or personal account may give you access

Abstract

A surface plasmon resonant cavity capable of enhancing ultradeep subwavelength photolithography in a large area is proposed. The cavity consists of two metal films: one is etched with periodic grooves for exciting surface plasmon resonance at the metal/dielectric interface; the other below is separated by a photoresist layer. Numerical simulations show that the properties of photolithographic patterns in the cavity can be modulated by the depth of the cavity; the physical image behind the modulation is confirmed by the phase regulation of gap surface plasmons in such a system.

© 2012 Optical Society of America

Full Article  |  PDF Article
More Like This
Tunable ultra-deep subwavelength photolithography using a surface plasmon resonant cavity

Weihao Ge, Chinhua Wang, Yinfei Xue, Bing Cao, Baoshun Zhang, and Ke Xu
Opt. Express 19(7) 6714-6723 (2011)

Subwavelength photolithography based on surface-plasmon polariton resonance

Xiangang Luo and Teruya Ishihara
Opt. Express 12(14) 3055-3065 (2004)

Designing surface plasmon resonance of subwavelength hole arrays by studying absorption

Lin Wu, Ping Bai, and Er Ping Li
J. Opt. Soc. Am. B 29(4) 521-528 (2012)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (5)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved