Abstract

Layered synthetic microstructures (LSM’s) are manufactured structures consisting of alternating layers of two materials, A and B, that have been deposited from a vapor to obtain uniform layer thicknesses t_a and t_b. As a consequence, LSM’s diffract x rays as if they had a characteristic superlattice parameter d = t_a + t_b. The details of this reflection process can be modeled and shown to depend critically on the x-ray optical properties of both A and B layers. Thus measurements of the diffraction of x rays by such LSM’s permit determination of x-ray optical constants. In this paper we report our initial results obtained from this technique. The sample studied contained 70 26-Å-thick titanium layers separated by 30.4-Å-thickamorphous carbon layers sequentially deposited onto a (100) single-crystal silicon substrate using sputter-deposition techniques. The diffraction-reflection behavior over the 2θ range 0° to 3.2° was measured at photon energies of 4795, 4895, 4945, 4955, 4965, 4970, 4975, 4977.5, 4980, 4982.5, 4985, 4995, 5045, 5145, and 5195 eV, the titanium K edge lying at 4965 eV. The maximum value of the real part of the anomalous dispersion coefficient of titanium Δf′(Ti) occurred at an energy of 4980 eV and had a value of −8.24 to −8.68 electrons. Our results for Δf′(Ti) are compared on a normalized wavelength basis (λ/λ_k) with values of Δf′(Ni) obtained by Bonse and Materlik [ Z. Phys. B 24, 189 ( 1976)] at the nickel K edge by interferometry, and good agreement is shown.

© 1984 Optical Society of America

Comparison between Ti anomalous x-ray scattering factors obtained from layered synthetic microstructures and the dispersion relationship

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