We have measured a propagation length L of TM₀ and TE₀ guided waves in a lossy Si film surrounded by identical dielectrics 632.8 nm in wavelength. The propagation length L^(E)_ATR estimated from experimental attenuated total reflection (ATR) spectra deviated largely from the propagation length L^(T)_ATR estimated from calculated ATR spectra in the range of small optical thickness of Si film h_opt. This discrepancy may arise from an angular beam spread of incident light. We have proposed a method to measure L directly. This method gave us an L for TM₀ guided waves of 1.6 mm at h_opt = 6.1 nm. This value is in good agreement with L^(T) _ATR when L^(E)_ATR = 0.2 mm, under certain conditions.

© 1995 Optical Society of America

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