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Journal of the Optical Society of America B

Journal of the Optical Society of America B

| OPTICAL PHYSICS

  • Vol. 14, Iss. 5 — May. 1, 1997
  • pp: 1029–1034

Coherent extreme-ultraviolet generation at 64 nm by efficient frequency tripling of an ArF laser

Yasuyuki Hirakawa, Tatsuo Okada, Mitsuo Maeda, and Katsunori Muraoka  »View Author Affiliations


JOSA B, Vol. 14, Issue 5, pp. 1029-1034 (1997)
http://dx.doi.org/10.1364/JOSAB.14.001029


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Abstract

Third-harmonic (TH) generation for an ArF excimer laser in a hydrogen (H2) gas jet was investigated. When the ArF laser radiation was tuned into a two-photon resonance in H2, enhanced efficiency for TH was observed. Optimum experimental conditions of efficient TH generation for our apparatus such as gas-jet density and energy fluence of the laser were obtained. Calculation of the phase-matching condition including absorption led to an optimum gas-jet profile for TH generation. Absolute TH energy of ∼1-μJ pulse was measured by two different methods. The proposed narrow-band extreme-ultraviolet source with a commercial excimer laser with a high repetition rate should be useful not only for scientific applications but also for industrial applications such as laser processing.

© 1997 Optical Society of America

Citation
Yasuyuki Hirakawa, Tatsuo Okada, Mitsuo Maeda, and Katsunori Muraoka, "Coherent extreme-ultraviolet generation at 64 nm by efficient frequency tripling of an ArF laser," J. Opt. Soc. Am. B 14, 1029-1034 (1997)
http://www.opticsinfobase.org/josab/abstract.cfm?URI=josab-14-5-1029


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References

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