Fabry–Perot microcavities were used for the enhancement and inhibition of photoluminescence (PL) in a hydrogenated amorphous silicon nitride (a-SiNx:H) microcavity fabricated with and without ammonia. A planar microcavity was realized that included a metallic back mirror and an a-SiNx:H–air or a metallic front mirror. The PL extends from the red part of the spectrum to the near infrared for the samples grown without ammonia. The PL is in the blue-green part of the spectrum for the samples grown with ammonia. The PL amplitude is enhanced and the PL linewidth is reduced with respect to those in bulk a-SiNx:H. The numerically calculated transmittance, reflectance, and absorbance spectra agree well with the experimentally measured spectra.
© 1998 Optical Society of America
A. Serpengüzel, A. Aydinli, A. Bek, and M. Güre, "Visible photoluminescence from planar amorphous silicon nitride microcavities," J. Opt. Soc. Am. B 15, 2706-2711 (1998)