A number of explanations have been put forward to account for systematic discrepancies between the results of surface Brillouin scattering spectroscopy and those of ultrasonic measurements. These include the effect of surface imperfections, geometrical aperture effects, and variation in the scattering cross section. We have developed an analytical procedure for correcting the errors associated with the aperture and the cross section, taking into account issues such as sample anisotropy and out-of-plane scattering that were not previously considered. These new computational tools can be applied to ripple scattering for arbitrary polarization from any smooth opaque surface, including films and multilayers. The power of the approach is demonstrated for the case of single-crystal silicon, in which some features of the observed spectra are more accurately predicted. Experimental methods that minimize the errors are also discussed.

© 1998 Optical Society of America

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