We report on the use of several complementary techniques for the optical characterization of semiconductor waveguides for parametric generation. Grating-assisted distributed coupling, x-ray reflectometry, and surface-emitting second-harmonic generation allowed us to evaluate the effective indices of the guided modes, the thickness of each constituent layer, and the modal birefringences of a multilayer AlGaAs/AlAs waveguide, respectively. With the experimental accuracy afforded by these techniques we could precisely infer the bulk refractive indices of various films to comply with the strict requirements for phase-matched guided-wave devices.
© 2002 Optical Society of America
Giuseppe Leo, Gaetano Assanto, Olivier Durand, and Vincent Berger, "Characterization of AlGaAs/AlAs waveguides for optical parametric interactions," J. Opt. Soc. Am. B 19, 902-910 (2002)