OSA's Digital Library

Journal of the Optical Society of America B

Journal of the Optical Society of America B

| OPTICAL PHYSICS

  • Vol. 20, Iss. 4 — Apr. 1, 2003
  • pp: 752–759

Reflection of light in a long-wavelength approximation from an N-layer system of inhomogeneous dielectric films and optical diagnostics of ultrathin layers. I. Absorbing substrate

Peep Adamson  »View Author Affiliations


JOSA B, Vol. 20, Issue 4, pp. 752-759 (2003)
http://dx.doi.org/10.1364/JOSAB.20.000752


View Full Text Article

Enhanced HTML    Acrobat PDF (214 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

The reflection of s- and p-polarized light from an N-layer system of inhomogeneous ultrathin dielectric films upon absorbing homogeneous substrates is investigated. The first-order approximate expressions for differential reflectance and changes in the ellipsometric parameters that are caused by a multilayer system are obtained in the long-wavelength limit. The possibilities of using these formulas for resolving the inverse problem for inhomogeneous ultrathin films are discussed. A number of novel options are developed for simultaneously determining the dielectric constant and thickness of a homogeneous ultrathin film by differential reflectance and ellipsometric measurements.

© 2003 Optical Society of America

OCIS Codes
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.5700) Instrumentation, measurement, and metrology : Reflection
(240.0310) Optics at surfaces : Thin films
(260.2110) Physical optics : Electromagnetic optics
(260.2130) Physical optics : Ellipsometry and polarimetry
(310.6860) Thin films : Thin films, optical properties

Citation
Peep Adamson, "Reflection of light in a long-wavelength approximation from an N-layer system of inhomogeneous dielectric films and optical diagnostics of ultrathin layers. I. Absorbing substrate," J. Opt. Soc. Am. B 20, 752-759 (2003)
http://www.opticsinfobase.org/josab/abstract.cfm?URI=josab-20-4-752

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited