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Journal of the Optical Society of America B

Journal of the Optical Society of America B

| OPTICAL PHYSICS

  • Vol. 20, Iss. 4 — Apr. 1, 2003
  • pp: 752–759

Reflection of light in a long-wavelength approximation from an N-layer system of inhomogeneous dielectric films and optical diagnostics of ultrathin layers. I. Absorbing substrate

Peep Adamson  »View Author Affiliations


JOSA B, Vol. 20, Issue 4, pp. 752-759 (2003)
http://dx.doi.org/10.1364/JOSAB.20.000752


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Abstract

The reflection of s- and p-polarized light from an N-layer system of inhomogeneous ultrathin dielectric films upon absorbing homogeneous substrates is investigated. The first-order approximate expressions for differential reflectance and changes in the ellipsometric parameters that are caused by a multilayer system are obtained in the long-wavelength limit. The possibilities of using these formulas for resolving the inverse problem for inhomogeneous ultrathin films are discussed. A number of novel options are developed for simultaneously determining the dielectric constant and thickness of a homogeneous ultrathin film by differential reflectance and ellipsometric measurements.

© 2003 Optical Society of America

OCIS Codes
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.5700) Instrumentation, measurement, and metrology : Reflection
(240.0310) Optics at surfaces : Thin films
(260.2110) Physical optics : Electromagnetic optics
(260.2130) Physical optics : Ellipsometry and polarimetry
(310.6860) Thin films : Thin films, optical properties

Citation
Peep Adamson, "Reflection of light in a long-wavelength approximation from an N-layer system of inhomogeneous dielectric films and optical diagnostics of ultrathin layers. I. Absorbing substrate," J. Opt. Soc. Am. B 20, 752-759 (2003)
http://www.opticsinfobase.org/josab/abstract.cfm?URI=josab-20-4-752


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References

  1. P. Drude, Lehrbuch der Optik (Hirzel, Leipzig, Germany, 1912).
  2. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).
  3. L. Ward, The Optical Constants of Bulk Materials and Films (IOP Publishing, Bristol, UK, 1988).
  4. G. Bauer and W. Richter, eds., Optical Characterization of Epitaxial Semiconductor Layers (Springer-Verlag, Berlin, 1996).
  5. A. N. Saxena, “Changes in the phase and amplitude of polarized light reflected from a film-covered surface and their relations with the film thickness,” J. Opt. Soc. Am. 55, 1061-1067 (1965).
  6. J. P. E. McIntyre and D. E. Aspnes, “Differential reflection spectroscopy of very thin surface films,” Surf. Sci. 24, 417-434 (1971).
  7. P. V. Adamson, “Differential reflection spectroscopy of surface layers on thick transparent substrates with normally incident light,” Opt. Spectrosc. 80, 459-468 (1996).
  8. G. Tyras, Radiation and Propagation of Electromagnetic Waves (Academic, New York, 1969).
  9. B. Sheldon, J. S. Haggerty, and A. G. Emslie, “Exact computation of the reflectance of a surface layer of arbitrary refractive-index profile and an approximate solution of the inverse problem,” J. Opt. Soc. Am. 72, 1049-1055 (1982).
  10. F. Abeles, “Optical properties of thin absorbing films,” J. Opt. Soc. Am. 47, 473-482 (1957).
  11. W. J. Plieth and K. Naegele, “U¨ber die Bestimmung der Optischen Konstanten Du¨nnster Oberfla¨chenschichten und das Problem der Schichtdicke,” Surf. Sci. 64, 484-496 (1977).
  12. J. Lekner, Theory of Reflection of Electromagnetic and Particle Waves (Nijhoff, Dordrecht, The Netherlands, 1987).
  13. A. Bagchi, R. G. Barrera, and A. K. Rajagopal, “Perturbative approach to the calculation of the electric field near a metal surface,” Phys. Rev. B 20, 4824-4838 (1979).
  14. S. A. Tretyakov and A. H. Sihvola, “On the homogenization of isotropic layers,” IEEE Trans. Antennas Propag. 48, 1858-1861 (2000).
  15. R. J. Archer and G. W. Gobeli, “Measurement of oxygen adsorption on silicon by ellipsometry,” J. Phys. Chem. Solids 26, 343-351 (1965).
  16. W.-K. Paik and J. O’M. Bockris, “Exact ellipsometric measurement of thickness and optical properties of a thin light-absorbing film without auxiliary measurements,” Surf. Sci. 28, 61-68 (1971).
  17. R. C. O’Handley, “Obtaining three surface-film parameters from two ellipsometric measurements,” Surf. Sci. 46, 24-42 (1974).
  18. B. D. Cahan, “Implications of three parameter solutions to the three-layer model,” Surf. Sci. 56, 354–372 (1976).

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