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Journal of the Optical Society of America B

Journal of the Optical Society of America B

| OPTICAL PHYSICS

  • Vol. 21, Iss. 2 — Feb. 1, 2004
  • pp: 370–375

Generation of vacuum-ultraviolet light below 160 nm in a KBBF crystal by the fifth harmonic of a single-mode Ti:sapphire laser

Teruto Kanai, Takeshi Kanda, Taro Sekikawa, Shuntaro Watanabe, Tadashi Togashi, Chuangtian Chen, Chengqian Zhang, Zuyan Xu, and Jiyang Wang  »View Author Affiliations


JOSA B, Vol. 21, Issue 2, pp. 370-375 (2004)
http://dx.doi.org/10.1364/JOSAB.21.000370


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Abstract

We have generated a vacuum-ultraviolet light below 160 nm by sum-frequency mixing in an optically contacted, prism-coupled KBe2BO3F2 crystal. The vacuum-ultraviolet light was generated as the fifth harmonic of a tunable, single-mode, 1-kHz Ti:sapphire laser system. The wavelength of 156 nm, to our knowledge, is the shortest ever obtained by use of nonlinear crystals in a phase-matched process. In addition, we demonstrated a 157.6-nm light source as an inspection tool for F2 laser lithography with an average power of 0.8 μW.

© 2004 Optical Society of America

OCIS Codes
(190.2620) Nonlinear optics : Harmonic generation and mixing
(190.4400) Nonlinear optics : Nonlinear optics, materials

Citation
Teruto Kanai, Takeshi Kanda, Taro Sekikawa, Shuntaro Watanabe, Tadashi Togashi, Chuangtian Chen, Chengqian Zhang, Zuyan Xu, and Jiyang Wang, "Generation of vacuum-ultraviolet light below 160 nm in a KBBF crystal by the fifth harmonic of a single-mode Ti:sapphire laser," J. Opt. Soc. Am. B 21, 370-375 (2004)
http://www.opticsinfobase.org/josab/abstract.cfm?URI=josab-21-2-370

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