OSA's Digital Library

Journal of the Optical Society of America B

Journal of the Optical Society of America B

| OPTICAL PHYSICS

  • Vol. 21, Iss. 2 — Feb. 1, 2004
  • pp: 370–375

Generation of vacuum-ultraviolet light below 160 nm in a KBBF crystal by the fifth harmonic of a single-mode Ti:sapphire laser

Teruto Kanai, Takeshi Kanda, Taro Sekikawa, Shuntaro Watanabe, Tadashi Togashi, Chuangtian Chen, Chengqian Zhang, Zuyan Xu, and Jiyang Wang  »View Author Affiliations


JOSA B, Vol. 21, Issue 2, pp. 370-375 (2004)
http://dx.doi.org/10.1364/JOSAB.21.000370


View Full Text Article

Acrobat PDF (333 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We have generated a vacuum-ultraviolet light below 160 nm by sum-frequency mixing in an optically contacted, prism-coupled KBe<sub>2</sub>BO<sub>3</sub>F<sub>2</sub> crystal. The vacuum-ultraviolet light was generated as the fifth harmonic of a tunable, single-mode, 1-kHz Ti:sapphire laser system. The wavelength of 156 nm, to our knowledge, is the shortest ever obtained by use of nonlinear crystals in a phase-matched process. In addition, we demonstrated a 157.6-nm light source as an inspection tool for F<sub>2</sub> laser lithography with an average power of 0.8 μW.

© 2004 Optical Society of America

OCIS Codes
(190.2620) Nonlinear optics : Harmonic generation and mixing
(190.4400) Nonlinear optics : Nonlinear optics, materials

Citation
Teruto Kanai, Takeshi Kanda, Taro Sekikawa, Shuntaro Watanabe, Tadashi Togashi, Chuangtian Chen, Chengqian Zhang, Zuyan Xu, and Jiyang Wang, "Generation of vacuum-ultraviolet light below 160 nm in a KBBF crystal by the fifth harmonic of a single-mode Ti:sapphire laser," J. Opt. Soc. Am. B 21, 370-375 (2004)
http://www.opticsinfobase.org/josab/abstract.cfm?URI=josab-21-2-370


Sort:  Author  |  Year  |  Journal  |  Reset

References

  1. T. Suganuma, H. Kubo, O. Wakabayashi, H. Mizoguchi, K. Nakao, Y. Nabekawa, T. Togashi, and S. Watanabe, “157-nm coherent light source as an inspection tool for F2 laser lithography,” Opt. Lett. 27, 46–48 (2002).
  2. T. Togashi, T. Kanai, T. Sekikawa, S. Watanabe, C. T. Chen, C. Zhang, Z. Xu, and J. Wang, “Generation of vacuum-ultraviolet light by an optically contacted, prism-coupled KBe2BO3F2 crystal,” Opt. Lett. 28, 254–256 (2003).
  3. V. Petrov, F. Rotermund, and F. Noack, “Generation of femtosecond pulses down to 166 nm by sum-frequency mixing in KB5O84H2O,” Electron. Lett. 34, 1–2 (1998).
  4. C. T. Chen, J. Lu, T. Togashi, T. Suganuma, T. Sekikawa, S. Watanabe, Z. Xu, and J. Wang, “Second-harmonic generation from a KBe2BO3F2 crystal in deep ultraviolet,” Opt. Lett. 27, 637–639 (2002).
  5. V. Petrov, F. Rotermund, F. Noack, J. Ringling, O. Kittelmann, and R. Komatsu, “Frequency conversion of Ti:sapphire-based femtosecond laser systems to the 200-nm spectral region using nonlinear optical crystals,” IEEE J. Sel. Top. Quantum Electron. 5, 1532–1542 (1999).
  6. A. Borsutzky, R. Brünger, Ch. Huang, and R. Wallenstein, “Harmonic and sum-frequency generation of pulsed laser radiation in BBO, LBO, and KD*P,” Appl. Phys. B 52, 55–62 (1991).
  7. C. Chen, Z. Xu, D. Deng, J. Zhang, G. K. L. Wong, B. Wu, N. Ye, and D. Tang, “The vacuum ultraviolet phase-matching characteristics of nonlinear optical KBe2BO3F2 crystal,” Appl. Phys. Lett. 68, 2930–2932 (1996).
  8. I. H. Malitson, “A redetermination of some optical properties of calcium fluoride,” Appl. Opt. 2, 1103–1107 (1963).
  9. Y. Nabekawa, T. Togashi, T. Sekikawa, S. Watanabe, S. Konno, T. Kojima, S. Fujikawa, and K. Yasui, “All-solid-state high-peak-power Ti:sapphire laser system above 5-kHz repetition rate,” Appl. Phys. B 70, S171–S179 (2000).
  10. I. Davoli, V. V. Mikhailin, S. Stizza, and A. N. Yasil’ev, “Urbach effect in the kinetics of core holes for excitation of cross-luminescence,” J. Lumin. 51, 275–282 (1992).
  11. H. Kouta and Y. Kuwano, “Attaining 186-nm light generation in cooled β-BaB2O4 crystal,” Opt. Lett. 24, 1230–1232 (1999).
  12. H. Setoya, “Report on F2 laser lithography project” (Association of Super-Advanced Electronics Technology, Tokyo, 2002).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited