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Journal of the Optical Society of America B

Journal of the Optical Society of America B


  • Vol. 21, Iss. 2 — Feb. 1, 2004
  • pp: 442–453

Reference wavelengths in the spectra of Fe, Ge, and Pt in the region near 1935 Å

Gillian Nave and Craig J. Sansonetti  »View Author Affiliations

JOSA B, Vol. 21, Issue 2, pp. 442-453 (2004)

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Wavelengths of seven spectral lines of Fe I, Ge I, and Pt I between 1932 Å and 1938 Å have been measured with uncertainties of less than 1×10-4 Å (5 parts in 108) with Fourier-transform spectroscopy. These lines provide accurate standards for wavelength calibration of ArF excimer lasers operating at 193 nm. Previously reported wavelengths of Fe I, Cu II, and Ge I were evaluated for calibration of the absolute wavelength scale. Calibrations based on Fe I and Ge I were found to differ systematically by several parts in 108. A calibration based on Cu II was internally inconsistent at a level of 2 parts in 107 and was not used. Improved wavelengths for an additional 147 lines of Pt I and Pt II and 161 lines of Kr II in the region 1636 Å to 3151 Å are also reported.

© 2004 Optical Society of America

OCIS Codes
(300.6300) Spectroscopy : Spectroscopy, Fourier transforms
(300.6540) Spectroscopy : Spectroscopy, ultraviolet

Gillian Nave and Craig J. Sansonetti, "Reference wavelengths in the spectra of Fe, Ge, and Pt in the region near 1935 Å," J. Opt. Soc. Am. B 21, 442-453 (2004)

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