OSA's Digital Library

Journal of the Optical Society of America B

Journal of the Optical Society of America B


  • Vol. 22, Iss. 4 — Apr. 1, 2005
  • pp: 913–916

Crack-free BaTiO3 films on Si with SiO2, MgO, or Al2O3 buffer layers

Thomas Lipinsky, Juergen Schubert, and Christoph Buchal  »View Author Affiliations

JOSA B, Vol. 22, Issue 4, pp. 913-916 (2005)

View Full Text Article

Enhanced HTML    Acrobat PDF (133 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



Crack-free polycrystalline BaTiO3 films of up to 1-µm thickness were grown on silicon and on silicon-on-sapphire (SoS) substrates by pulsed laser deposition. The quality of films of different thickness was studied, particularly the onset of the formation of cracks. The crystallinity of the films was confirmed by x-ray diffraction measurements. The thickness and composition of the films were examined by Rutherford backscattering spectrometry. The optical properties (index of refraction and damping) of planar BaTiO3 waveguides were determined with a prism coupling setup. The films showed an optical attenuation of less than 2 dB/cm and a birefringence of up to 0.01.

© 2005 Optical Society of America

OCIS Codes
(310.1860) Thin films : Deposition and fabrication
(310.6860) Thin films : Thin films, optical properties

Thomas Lipinsky, Juergen Schubert, and Christoph Buchal, "Crack-free BaTiO3 films on Si with SiO2, MgO, or Al2O3 buffer layers," J. Opt. Soc. Am. B 22, 913-916 (2005)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. A. Petraru, J. Schubert, M. Schmid, and Ch. Buchal, "Ferroelectric BaTiO3 thin-film optical waveguide modulators," Appl. Phys. Lett. 81, 1375-1377 (2002). [CrossRef]
  2. Y. S. Touloukian and C. Y. Ho, "Thermophysical properties of matter," in The TPRC Data Series Vol. 13: Thermal Expansion Nonmetallic Solids (Plenum, New York, 1977), p. 554.
  3. J. P. Nair and I. Lubomirsky, "Elastic deformation in thin freestanding ferroelectric films," Adv. Eng. Mater. 4, 604-607 (2002). [CrossRef]
  4. R. A. McKee, F. J. Walker, J. R. Conner, E. D. Specht, and D. E. Zelmon, "Molecular beam epitaxy growth of epitaxial barium silicide, barium oxide, and barium titanate on silicon," Appl. Phys. Lett. 59, 782-784 (1991). [CrossRef]
  5. F. Niu, A. R. Teren, B. H. Hoerman, and B. W. Wessels, "Epitaxial ferroelectric BaTiO3 thin films for microphotonic applications," Mater. Res. Soc. Symp. Proc. 637, E1.9.1-E1.9.6 (2001).
  6. S. B. Desu, "Influence of stresses on the properties of ferroelectric BaTiO3 thin films," J. Electrochem. Soc. 140, 2981-2987 (1993). [CrossRef]
  7. B. D. Cullity, Elements of X-Ray Diffraction , 2nd ed., Addison-Wesley Series in Metallurgy and Materials (Addison-Wesley Reading, Mass., 1978), p. 356.
  8. D. J. Towner, J. Ni, T. J. Marks, and B. W. Wessels, "Effects of two-stage deposition on the structure and properties of heteroepitaxial BaTiO3 thin films," J. Cryst. Growth 255, 107-113 (2003). [CrossRef]
  9. R. Ulrich and R. Torge, "Measurement of thin film parameters with a prism coupler," Appl. Opt. 12, 2901-2908 (1973). [CrossRef] [PubMed]
  10. A. Petraru, J. Schubert, M. Schmid, O. Trithaveesak, and Ch. Buchal, "Electro-optic Mach-Zehnder modulators with polycrystalline BaTiO3 thin films on MgO," Mater. Res. Soc. Symp. Proc. 748, U11.2.1-U11.2.6 (2003).
  11. L. Beckers, J. Schubert, W. Zander, J. Ziesmann, A. Eckau, P. Leinenbach, and Ch. Buchal, "Structural and optical characterization of epitaxial waveguiding BaTiO3 thin films on MgO," J. Appl. Phys. 83, 3305-3310 (1998). [CrossRef]
  12. R. A. McKee, F. J. Walker, E. D. Specht, and K. B. Alexander, "The MBE growth and optical quality of BaTiO3 and SrTiO3 thin films on MgO," Mater. Res. Soc. Symp. Proc. 341, 309-314 (1994). [CrossRef]
  13. P. Tang, D. J. Towner, A. L. Meier, and B. W. Wessels, "Polarisation-insensitive Si3N4 strip-loaded BaTiO3 thin waveguide with low propagation losses," Electron. Lett. 39, 1651-1652 (2003). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Fig. 1 Fig. 2 Fig. 3
Fig. 4

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited