Three-dimensional diffraction analysis of gratings based on Legendre expansion of electromagnetic fields
JOSA B, Vol. 24, Issue 10, pp. 2676-2685 (2007)
http://dx.doi.org/10.1364/JOSAB.24.002676
Enhanced HTML Acrobat PDF (616 KB)
Abstract
Three-dimensional vectorial diffraction analysis of gratings is presented based on Legendre polynomial expansion of electromagnetic fields. In contrast to conventional rigorous coupled wave analysis (RCWA) in which the solution is obtained using state variables representation of the coupled wave amplitudes, here the solution of first-order coupled Maxwell’s equations is expanded in terms of Legendre polynomials, where Maxwell’s equations are analytically projected in the Hilbert space spanned by Legendre polynomials. This approach yields well-behaved algebraic equations for deriving diffraction efficiencies and electromagnetic field profiles without facing the problem of numerical instability. The proposed approach can be applied in the analysis of two cases: first, arbitrarily oriented planar gratings with slanted yet homogeneous fringes; second, nonslanted but longitudinally inhomogeneous gratings. The method is then applied to various test cases within the above-mentioned two categories, comparison to other methods already reported in the literature is made, and the presented approach is justified. Different aspects of the proposed method such as numerical stability and convergence rate are also investigated. Special attention is given to how the resonant frequency of frequency selective structures varies with introducing tilt angles and/or longitudinal inhomogenity in the permittivity profile.
© 2007 Optical Society of America
OCIS Codes
(000.3860) General : Mathematical methods in physics
(050.1950) Diffraction and gratings : Diffraction gratings
(050.2770) Diffraction and gratings : Gratings
(050.7330) Diffraction and gratings : Volume gratings
ToC Category:
Diffraction and Gratings
History
Original Manuscript: April 18, 2007
Revised Manuscript: July 3, 2007
Manuscript Accepted: August 9, 2007
Published: September 21, 2007
Citation
Amin Khavasi, Khashayar Mehrany, and Bizhan Rashidian, "Three-dimensional diffraction analysis of gratings based on Legendre expansion of electromagnetic fields," J. Opt. Soc. Am. B 24, 2676-2685 (2007)
http://www.opticsinfobase.org/josab/abstract.cfm?URI=josab-24-10-2676
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