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Journal of the Optical Society of America B

Journal of the Optical Society of America B


  • Editor: Henry M. Van Driel
  • Vol. 25, Iss. 7 — Jul. 1, 2008
  • pp: B20–B26

Analysis of extreme ultraviolet microscopy images of patterned nanostructures based on a correlation method

P. W. Wachulak, C. A. Brewer, F. Brizuela, C. S. Menoni, W. Chao, E. H. Anderson, R. A. Bartels, J. J. Rocca, and M. C. Marconi  »View Author Affiliations

JOSA B, Vol. 25, Issue 7, pp. B20-B26 (2008)

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A method to analyze extreme ultraviolet microscopy images of nanostructures that allows for the simultaneous determination of an object’s feature size and image resolution is presented. It is based on the correlation between the image and a set of templates of known resolution generated from the original image using Gaussian filters. The analysis was applied to images obtained with a Fresnel zone plate microscope that uses a 13.2 nm wavelength laser light for illumination. The object’s feature size and the resolution obtained with this method are shown to be in very good agreement with independent measurements of both magnitudes.

© 2008 Optical Society of America

OCIS Codes
(100.2000) Image processing : Digital image processing
(100.2960) Image processing : Image analysis
(110.0180) Imaging systems : Microscopy

ToC Category:
High-field Short Wavelengths

Original Manuscript: December 21, 2007
Manuscript Accepted: January 29, 2008
Published: April 7, 2008

Virtual Issues
Vol. 3, Iss. 8 Virtual Journal for Biomedical Optics

P. W. Wachulak, C. A. Brewer, F. Brizuela, C. S. Menoni, W. Chao, E. H. Anderson, R. A. Bartels, J. J. Rocca, and M. C. Marconi, "Analysis of extreme ultraviolet microscopy images of patterned nanostructures based on a correlation method," J. Opt. Soc. Am. B 25, B20-B26 (2008)

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  1. W. L. Chao, B. D. Harteneck, J. A. Liddle, E. H. Anderson, and D. T. Attwood, “Soft x-ray microscopy at a spatial resolution better than 15nm,” Nature 435, 1210-1213 (2005). [CrossRef] [PubMed]
  2. P. A. C. Takman, H. Stollberg, G. A. Johansson, A. Holmberg, M. Lindblom, and H. M. Hertz, “High-resolution compact x-ray microscopy,” J. Microsc. 226, 175-181 (2007). [CrossRef] [PubMed]
  3. G. Vaschenko, C. Brewer, E. Brizuela, Y. Wang, M. A. Larotonda, B. M. Luther, M. C. Marconi, J. J. Rocca, and C. S. Menoni, “Sub-38nm resolution tabletop microscopy with 13nm wavelength laser light,” Opt. Lett. 31, 1214-1216 (2006). [CrossRef] [PubMed]
  4. H. M. Hertz, G. A. Johansson, H. Stollberg, J. de Groot, O. Hemberg, A. Holmberg, S. Rehbein, P. Jansson, F. Eriksson, and J. Birch, “Tabletop x-ray microscopy: sources, optics and applications,” J. Phys. IV 104, 115-119 (2003).
  5. D. Attwood, Soft X-Ray and Extreme Ultraviolet Radiation, Principles and Applications (Cambridge U. Press, 2000), p. 357.
  6. J. Heck, D. T. Attwood, W. Meyer-Ilse, and E. H. Anderson, “Resolution determination in x-ray microscopy: an analysis of the effects of partial coherence and illumination spectrum,” J. X-Ray Sci. Technol. 8, 95-104 (1998).
  7. Q. Kemao, “Two-dimensional windowed Fourier transform for fringe pattern analysis: principles, applications and implementations,” Opt. Lasers Eng. 45, 304-317 (2007). [CrossRef]
  8. M. S. Pattichis and A. C. Bovik, “Analyzing image structure by multidimensional frequency modulation,” IEEE Trans. Pattern Anal. Mach. Intell. 29, 753-766 (2007). [CrossRef] [PubMed]
  9. H. Stollberg, J. B. De Monvel, A. Holmberg, and H. M. Hertz, “Wavelet-based image restoration for compact x-ray microscopy,” J. Microsc. 211, 154-160 (2003). [CrossRef] [PubMed]
  10. H. Stollberg, P. Guttmann, P. A. C. Takman, and H. M. Hertz, “Size-selective colloidal-gold localization in transmission x-ray microscopy,” J. Microsc. 225, 80-87 (2007). [CrossRef] [PubMed]
  11. P. Wachulak, M. C. Marconi, R. Bartels, C. S. Menoni, and J. J. Rocca, “Volume extreme ultraviolet holographic imaging with numerical optical sectioning,” Opt. Express 15, 10622-10628 (2007). [CrossRef] [PubMed]
  12. J. Nunez, X. Otazu, and M. T. Merino, “A multiresolution-based method for the determination of the relative resolution between images: first application to remote sensing and medical images,” Int. J. Imaging Syst. Technol. 15, 225-235 (2005). [CrossRef]
  13. P. Wachulak, R. Bartels, M. C. Marconi, C. S. Menoni, J. J. Rocca, Y. Lu, and B. Parkinson, “Sub 400nm spatial resolution extreme ultraviolet holography with a table top laser,” Opt. Express 14, 9636-9642 (2006). [CrossRef] [PubMed]
  14. Y. Wang, M. A. Larotonda, B. M. Luther, D. Alessi, M. Berrill, V. N. Shlyaptsev, and J. J. Rocca, “Demonstration of high-repetition-rate tabletop soft-x-ray lasers with saturated output at wavelengths down to 13.9nm and gain down to 10.9nm,” Phys. Rev. A 72, 053807 (2005). [CrossRef]
  15. J. J. Rocca, Y. Wang, M. A. Larotonda, B. M. Luther, M. Berrill, and D. Alessi, “Saturated 13.2nm high-repetition-rate laser in nickellike cadmium,” Opt. Lett. 30, 2581-2583 (2005). [CrossRef] [PubMed]
  16. E. H. Anderson, “Specialized electron beam nanolithography for EUV and x-ray diffractive optics,” IEEE J. Quantum Electron. 42, 27-35 (2006). [CrossRef]
  17. E. H. Anderson, D. L. Olynick, B. Harteneck, E. Veklerov, G. Denbeaux, W. L. Chao, A. Lucero, L. Johnson, and D. Attwood, “Nanofabrication and diffractive optics for high-resolution x-ray applications,” J. Vac. Sci. Technol. B 18, 2970-2975 (2000). [CrossRef]
  18. T. Yatagai, S. Nakadate, M. Idesawa, and H. Saito, “Automatic fringe analysis using digital image processing techniques,” Opt. Eng. (Bellingham) 21, 432-435 (1982).

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