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Journal of the Optical Society of America B

Journal of the Optical Society of America B

| OPTICAL PHYSICS

  • Editor: Henry M. Van Driel
  • Vol. 25, Iss. 7 — Jul. 1, 2008
  • pp: B85–B91

Gas-phase study of the reactivity of optical coating materials with hydrocarbons by use of a desktop-size extreme-ultraviolet laser

Scott Heinbuch, Feng Dong, Jorge J. Rocca, and Elliot R. Bernstein  »View Author Affiliations


JOSA B, Vol. 25, Issue 7, pp. B85-B91 (2008)
http://dx.doi.org/10.1364/JOSAB.25.000B85


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Abstract

The reactivity of prospective capping-layer extreme-ultraviolet (EUV) mirror materials with hydrocarbons is studied in the gas phase by use of mass spectroscopy of metal-oxide clusters. We report the results of chemistry studies for Si m , Ti m , Hf m , and Zr m O n metal-oxide clusters in which the reaction products were ionized with little or no fragmentation by 26.5 eV photons from a desktop-size 46.9 nm Ne-like Ar laser. Hf and Zr oxides are found to be much less reactive than Si or Ti oxides in the presence of EUV light. The results are relevant to the design of EUV mirror capping layers that are resistant to carbon contamination.

© 2008 Optical Society of America

OCIS Codes
(140.7240) Lasers and laser optics : UV, EUV, and X-ray lasers
(160.4670) Materials : Optical materials
(160.4760) Materials : Optical properties
(300.6170) Spectroscopy : Spectra
(310.6860) Thin films : Thin films, optical properties
(340.7480) X-ray optics : X-rays, soft x-rays, extreme ultraviolet (EUV)

ToC Category:
High-field Short Wavelengths

History
Original Manuscript: December 11, 2007
Revised Manuscript: March 12, 2008
Manuscript Accepted: March 21, 2008
Published: May 21, 2008

Citation
Scott Heinbuch, Feng Dong, Jorge J. Rocca, and Elliot R. Bernstein, "Gas-phase study of the reactivity of optical coating materials with hydrocarbons by use of a desktop-size extreme-ultraviolet laser," J. Opt. Soc. Am. B 25, B85-B91 (2008)
http://www.opticsinfobase.org/josab/abstract.cfm?URI=josab-25-7-B85


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