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Journal of the Optical Society of America B

Journal of the Optical Society of America B

| OPTICAL PHYSICS

  • Editor: Henry Van Driel
  • Vol. 26, Iss. 4 — Apr. 1, 2009
  • pp: 810–812

Nanoimprinting of dielectric loaded surface-plasmon-polariton waveguides using masters fabricated by 2-photon polymerization technique

Andreas Seidel, Christoph Ohrt, Sven Passinger, Carsten Reinhardt, Roman Kiyan, and Boris N. Chichkov  »View Author Affiliations


JOSA B, Vol. 26, Issue 4, pp. 810-812 (2009)
http://dx.doi.org/10.1364/JOSAB.26.000810


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Abstract

We report on a method of making dielectric loaded surface-plasmon-polariton waveguides by nanoimprint lithography from master structures fabricated using two-photon polymerization. This method employing molds from polydimethylsiloxane allows rapid reproduction of waveguide structures using a large variety of resist and substrate materials. Both master and imprinted samples are characterized and compared. Measurements are performed on the imprinted samples using leakage radiation microscopy.

© 2009 Optical Society of America

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(240.6680) Optics at surfaces : Surface plasmons
(160.4236) Materials : Nanomaterials
(350.4238) Other areas of optics : Nanophotonics and photonic crystals
(160.5335) Materials : Photosensitive materials
(250.5403) Optoelectronics : Plasmonics

ToC Category:
Optics at Surfaces

History
Original Manuscript: December 17, 2008
Manuscript Accepted: February 19, 2009
Published: March 26, 2009

Citation
Andreas Seidel, Christoph Ohrt, Sven Passinger, Carsten Reinhardt, Roman Kiyan, and Boris N. Chichkov, "Nanoimprinting of dielectric loaded surface-plasmon-polariton waveguides using masters fabricated by 2-photon polymerization technique," J. Opt. Soc. Am. B 26, 810-812 (2009)
http://www.opticsinfobase.org/josab/abstract.cfm?URI=josab-26-4-810

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