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Journal of the Optical Society of America B

Journal of the Optical Society of America B


  • Editor: Henry Van Driel
  • Vol. 26, Iss. 5 — May. 1, 2009
  • pp: 917–922

Spectroscopic second-harmonic generation from silicon-on-insulator wafers

Kjeld Pedersen and Thomas Garm Pedersen  »View Author Affiliations

JOSA B, Vol. 26, Issue 5, pp. 917-922 (2009)

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Optical second-harmonic generation from a silicon-on-insulator wafer has been investigated over a broad spectral region. The nonlinear signal shows oscillations with wavelengths that depend on the angle of incidence. A number of characteristic structures are caused by linear multiple reflections in the layered structure at the fundamental and second-harmonic wavelengths. Furthermore, an interference between signals generated by second-harmonic sources at different interfaces appears. Possibilities for isolating signals from buried interfaces through variations of pump wavelength and angle of incidence are discussed.

© 2009 Optical Society of America

OCIS Codes
(160.6000) Materials : Semiconductor materials
(190.2620) Nonlinear optics : Harmonic generation and mixing
(240.4350) Optics at surfaces : Nonlinear optics at surfaces

ToC Category:
Nonlinear Optics

Original Manuscript: January 29, 2009
Revised Manuscript: March 5, 2009
Manuscript Accepted: March 5, 2009
Published: April 3, 2009

Kjeld Pedersen and Thomas Garm Pedersen, "Spectroscopic second-harmonic generation from silicon-on-insulator wafers," J. Opt. Soc. Am. B 26, 917-922 (2009)

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  1. G. K. Celler and S. Cristoloveanu, “Frontiers of silicon-on-insulator,” J. Appl. Phys. 93, 4955-4978 (2003). [CrossRef]
  2. G. Lüpke, “Characterization of semiconductor interfaces by second-harmonic generation,” Surf. Sci. Rep. 35, 75-161 (1999). [CrossRef]
  3. G. Erley, R. Butz, and W. Daum, “Second-harmonic spectroscopy of interband excitations at the interfaces of strained Si(100)-Si0.85Ge0.15-SiO2 heterostructures,” Phys. Rev. B 59, 2915-2926 (1999). [CrossRef]
  4. S. Bergfeld, B. Braunschweig, and W. Daum, “Nonlinear optical spectroscopy at oxidized Si(111) interfaces,” Phys. Rev. Lett. 93, 097402 (2004). [CrossRef] [PubMed]
  5. W. Daum, “Optical studies of Si/SiO2 interfaces by second-harmonic generation spectroscopy of silicon interband transitions,” Appl. Phys. A 87, 451-460 (2007). [CrossRef]
  6. Y. Q. An, R. Carriles, and M. C. Downer, “Absolute phase and amplitude of second-order nonlinear optical susceptibility components at Si(001) interfaces,” Phys. Rev. B 75, 241307 (2007). [CrossRef]
  7. Y. Q. An and S. Cundiff, “Phase inversion in rotational anisotropy of second harmonic generation at Si(001) interfaces,” Phys. Rev. B 67, 193302 (2003). [CrossRef]
  8. J. Bloch, J. G. Mihaychuk, and H. M. van Driel, “Electron photoinjection from silicon to ultrathin SiO2 films via ambient oxygen,” Phys. Rev. Lett. 77, 920-923 (1996). [CrossRef] [PubMed]
  9. Z. Marka, R. Pasternak, S. N. Rashkeev, Y. Jiang, S. T. Pantelides, N. H. Tolk, P. K. Roy, and J. Kozub, “Band offsets measured by internal photoemission-induced second-harmonic generation,” Phys. Rev. B 67, 045302 (2003). [CrossRef]
  10. B. Jun, Y. V. White, R. D. Schrimpf, D. M. Fleetwood, F. Brunier, N. Bresson, S. Christoloveanu, and N. H. Tolk, “Characterization of multiple Si/SiO2 interfaces in silicon-on-insulator materials via second-harmonic generation,” Appl. Phys. Lett. 85, 3095-3097 (2004). [CrossRef]
  11. B. Jun, R. D. Schrimpf, D. M. Fleetwood, Y. V. White, R. Pasternak, S. N. Rashkeev, F. Brunier, N. Bresson, M. Fouillat, S. Christoloveanu, and N. H. Tolk, “Charge trapping in irradiated SOI wafers measured by second-harmonic generation,” IEEE Trans. Nucl. Sci. 51, 3231-3237 (2004). [CrossRef]
  12. N. H. Tolk, M. L. Alles, R. Pasternak, X. Lu, R. D. Schrimpf, D. M. Fleetwood, R. P. Dolan, and R. W. Standley, “Oxide interface studies using second harmonic generation,” Microelectron. Eng. 84, 2089-2092 (2007). [CrossRef]
  13. M. L. Alles, R. Pasternak, X. Lu, N. H. Tolk, R. D. Schrimpf, D. M. Fleetwood, R. P. Dolan, and R. W. Standley, “Second-harmonic generation for noninvasive metrology of silicon-on-insulator wafers,” IEEE Trans. Semicond. Manuf. 20, 107-113 (2007). [CrossRef]
  14. D. S. Bethune, “Optical harmonic generation and mixing in multilayer media: analysis using optical transfer matrix techniques,” J. Opt. Soc. Am. B 6, 910-916 (1989). [CrossRef]
  15. E.D.Palik ed., Handbook of Optical Properties of Solids, (Academic, 1985).
  16. J. E. Sipe, “New Green-function formalism for surface optics,” J. Opt. Soc. Am. B 4, 481-489 (1987). [CrossRef]
  17. J. E. Sipe, D. J. Moss, and H. M. van Driel, “Phenomenological theory of optical second-and third-harmonic generation from cubic centrosymmetric crystals,” Phys. Rev. B 35, 1129-1141 (1987). [CrossRef]

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