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Journal of the Optical Society of America B

Journal of the Optical Society of America B

| OPTICAL PHYSICS

  • Editor: Henry van Driel
  • Vol. 27, Iss. 12 — Dec. 1, 2010
  • pp: 2499–2504

Fiber-coupled near-infrared laser heterodyne interferometer with fast optical scanning

Long Gao, Chunhui Wang, Yanchao Li, Haifang Cong, and Yang Qu  »View Author Affiliations


JOSA B, Vol. 27, Issue 12, pp. 2499-2504 (2010)
http://dx.doi.org/10.1364/JOSAB.27.002499


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Abstract

A fiber-coupled infrared laser heterodyne interferometer system based on optical scanning is proposed. In this system, the sample is scanned through the combined configuration of a micro-electro-mechanical system mirror and an F-theta lens set. The distortion index of the F-theta lens set is less than 0.01%. In order to enhance the sensitivity of the heterodyne detection system, the dual-balanced heterodyne detection is applied in the measurement of the intermediate frequency signal. The theoretical model and the signal-to-noise ratio expression of the dual-balanced heterodyne detection system are derived in this paper. The interferometer system has a vertical resolution of 0.43 nm and a lateral resolution of 0.95 μ m . The stability of this system is approximately 1.90 nm for 1 h. Furthermore, the system possesses 8 s measurement time, 94.18 MHz output frequency, and 1550 nm eye-safe operating wavelength. Application of the system may be realized for any sample that has higher transmittance for the eye-safe wavelength.

© 2010 Optical Society of America

OCIS Codes
(030.4280) Coherence and statistical optics : Noise in imaging systems
(040.2840) Detectors : Heterodyne
(120.4630) Instrumentation, measurement, and metrology : Optical inspection

ToC Category:
Fiber Optics and Optical Communications

History
Original Manuscript: May 25, 2010
Revised Manuscript: September 1, 2010
Manuscript Accepted: October 3, 2010
Published: November 3, 2010

Citation
Long Gao, Chunhui Wang, Yanchao Li, Haifang Cong, and Yang Qu, "Fiber-coupled near-infrared laser heterodyne interferometer with fast optical scanning," J. Opt. Soc. Am. B 27, 2499-2504 (2010)
http://www.opticsinfobase.org/josab/abstract.cfm?URI=josab-27-12-2499


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References

  1. T. J. Kim, T. H. Ghong, and Y. W. Jung, “Study on interface analysis by using spectroscopic ellipsometry,” J. Korean Phys. Soc. 6, 2625–2629 (2009).
  2. A. Bourgeois, Y. Turcant, and C. Walsh, “Ellipsometry porosimetry (EP): Thin film porosimetry by coupling an adsorption setting with an optical measurement, highlights on diffusion results,” Appl. Surf. Sci. 256, S26–S29 (2009). [CrossRef]
  3. E. V. Davydenko and A. L. Priorov, “Signal processing in an optical laser triangulation system with the minimum set of components,” Meas. Tech. 10, 1097–1103 (2008). [CrossRef]
  4. L. J. Zeng, T. Ohnuki, and H. Matsumoto, “A new method for measuring the thickness and shape of a thin film simultaneously by combining interferometry and laser triangulation,” Proc. SPIE 2861, 1097–1103(1996).
  5. D. Z. Reinstein, T. J. Archer, and M. Gobbe, “Stromal thickness in the normal cornea: Three-dimensional display with Artemis very high-frequency digital ultrasound,” J. Refract. Surg. 25, 776–786 (2009). [CrossRef] [PubMed]
  6. M. Ohmi, T. Shiraishi, H. Tajiri, and M. Haruna, “Simultaneous measurement of refractive index and thickness of transparent plates by low coherence interferometry,” Opt. Rev. 4, 507–515 (1997). [CrossRef]
  7. B. Y. Chen, E. Z. Zhang, L. P. Yan, C. R. Li, W. H. Tang, and Q. B. Feng, “A laser interferometer for measuring straightness and its position based on heterodyne interferometry,” Rev. Sci. Instrum. 80, 115113–5 (2009). [CrossRef] [PubMed]
  8. K. H. Kwon, B. Soo Kim, and K. M. Chol, “A new scanning heterodyne interferometer scheme for mapping both surface structure and effective local reflection coefficient,” Opt. Express 16, 13456–13454 (2008). [CrossRef] [PubMed]
  9. C. V. Hsu, J. Y. Lin, K. H. Chen, and D. C. Su, “Alternative method for measuring both the refractive indices and the thickness of silver-halide holographic plates,” Opt. Eng. (Bellingham) 44, 055801–055806 (2005). [CrossRef]
  10. F. S. Chen, “Optically induced change of refractive indices in LiNbO3 and LiTaO3,” J. Appl. Opt. 40, 3389–3396 (1969).
  11. H. B. Serreze and R. B. Goldner, “Study of the wavelength dependence of optically induced birefringence change in un-doped LiNbO3,” Appl. Phys. Lett. 22, 626–627 (1973). [CrossRef]
  12. H. B. Serreze and R. B. Goldner, “A phase-sensitive technique for measuring small birefringence changes,” Rev. Sci. Instrum. 45, 1613–1614 (1974). [CrossRef]
  13. M. Tsukiji, “The effect of excitation methods on electrical characteristic of fully superconducting generator model,” IEEE Trans. Magnetics 30, 2030–2033 (1994). [CrossRef]
  14. J. W. You, D. Kim, and S. Y. Ryu, “Simultaneous measurement method of total and self-interference for the volumetric thickness profilometer,” Opt. Express 17, 1352–1360 (2009). [CrossRef] [PubMed]
  15. M. V. Aguanno, F. Lakestani, M. P. Whelan, and M. J. Connelly, “Full-field heterodyne interferometry using a complementary metal-oxide semiconductor digital signal processor camera for high-resolution profilometry,” Opt. Eng. (Bellingham) 46, 095601 (2007). [CrossRef]
  16. E. Ip, A. Pak, D. Barros, and J. M. Kahn, “Coherent detection in optical fiber systems,” Opt. Express 16, 753–763 (2008). [CrossRef] [PubMed]
  17. V. D. Protopopov, S. H. Cho, K. S. Kim, S. W. Lee, and H. Kim, “Differential heterodyne interferometer for measuring thickness of glass panels,” Rev. Sci. Instrum. 78, 076101–10 (2007). [CrossRef] [PubMed]
  18. M. A. Arain and N. A. Riza, “Fiber-coupled in-line heterodyne optical interferometer for minimally invasive sensing,” J. Lightwave Technol. 23, 2449–2454 (2005). [CrossRef]
  19. N. A. Riza, M. Sheikh, and F. Perez, “Optical substrate thickness measurement system using hybrid fiber-free space optics and selective wavelength interferometry,” Opt. Commun. 269, 24–29 (2007). [CrossRef]
  20. Y. U. Nam, M. S. Cheon, J. H. Ha, and Y. S. Hwang, “Improved common-path Fast-scanning heterodyne interferometer system as potential dense-plasma diagnostics,” Rev. Sci. Instrum. 75, 3417–3419 (2004). [CrossRef]
  21. Y. Q. Ji and W. M. Shen, “Design of F-Theta lens used in laser marking machine,” Proc. SPIE 6722, 1–5 (2007).

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