|
Fabrication of size scalable three-dimensional photonic structures via dual-beam multiple exposure and its robustness study |
JOSA B, Vol. 27, Issue 12, pp. 2534-2541 (2010)
http://dx.doi.org/10.1364/JOSAB.27.002534
Enhanced HTML 
Acrobat PDF (594 KB)
Abstract
We theoretically designed dual-beam triple exposure interference lithography to fabricate three-term diamond-like structures in SU-8 photoresist with scalable size and investigated the robustness of the optical setup against potential experimental errors. Minimal distortion could be achieved by careful selection of the angle between the bisector of the two beams and the normal of the sample surface to precompensate the anisotropic shrinkage. A small deviation of incident beam angles, however, would lead to a significant change in structural size when the angle between the two incident beams was small for a large sized structure, whereas the translational symmetry of the SU-8 structure remained reasonably close to face-centered cubic. We then experimentally demonstrate size scalable diamond-like photonic structures with the lattice symmetry and size close to the theoretical design.
© 2010 Optical Society of America
OCIS Codes
(090.0090) Holography : Holography
(260.3160) Physical optics : Interference
(160.5298) Materials : Photonic crystals
ToC Category:
Materials
History
Original Manuscript: June 28, 2010
Revised Manuscript: September 24, 2010
Manuscript Accepted: September 29, 2010
Published: November 5, 2010
Citation
Xuelian Zhu, Guanquan Liang, Yongan Xu, Shih-Chieh Cheng, and Shu Yang, "Fabrication of size scalable three-dimensional photonic structures via dual-beam multiple exposure and its robustness study," J. Opt. Soc. Am. B 27, 2534-2541 (2010)
http://www.opticsinfobase.org/josab/abstract.cfm?URI=josab-27-12-2534
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
Related Journal Articles 
- Formation of a microfiber bundle by interference of three noncoplanar beams (OL)
- All fourteen Bravais lattices can be formed by interference of four noncoplanar beams (OL)
- Optical tweezers with multiple optical forces using double-hologram interference (OE)
- Distortion of 3D SU8 photonic structures fabricated by four-beam holographic lithography withumbrella configuration (OE)
- Fabrication of photonic crystals with functional defects by one-step holographic lithography (OE)
Related Conference Papers
- Compact Spectral Diversity Filters for Diffuse Source Spectroscopy Using Spherical Beam Volume Holograms
- Rigorous Analysis of Strong Spherical Wave Gratings Using a Slice-and-Cascade Approach
- "Infinite" 2D Photonic Crystals for the Near Infrared
- Inversion of 3-Dimensional Polymer Photonic Crystal Fabricated by Diffractive Optics Laser Lithography
- Laser Scanning Holographic Fabrication of Large Area Photonic Crystal Templates
« Previous Article | Next Article »
OSA is a member of 