Abstract

We present the simulation, fabrication, and characterization of a metallic slot grating on a silicon waveguide ($30\mathrm{nm}$ slot width for a period of $500\mathrm{nm}$). According to the simulation, the experimental measured spectrum of the structure exhibits a dip in the near-infrared region. Moreover, the finite-difference time-domain simulation shows that this device can be used as a sensor, due to its high sensitivity to the refractive index variation of the medium above and inside the cavity ($\eta =\mathrm{\Delta }\lambda /\mathrm{\Delta }n=750\mathrm{nm}/\mathrm{refractive}$ index unit).

© 2011 Optical Society of America

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