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Journal of the Optical Society of America B

Journal of the Optical Society of America B

| OPTICAL PHYSICS

  • Editor: Henry van Driel
  • Vol. 29, Iss. 2 — Feb. 1, 2012
  • pp: A55–A59

Effect of atomic layer deposition on the quality factor of silicon nanobeam cavities

Michael Gehl, Ricky Gibson, Joshua Hendrickson, Andrew Homyk, Antti Säynätjoki, Tapani Alasaarela, Lasse Karvonen, Ari Tervonen, Seppo Honkanen, Sander Zandbergen, Benjamin C. Richards, J. D. Olitzky, Axel Scherer, Galina Khitrova, Hyatt M. Gibbs, Ju-Young Kim, and Yong-Hee Lee  »View Author Affiliations


JOSA B, Vol. 29, Issue 2, pp. A55-A59 (2012)
http://dx.doi.org/10.1364/JOSAB.29.000A55


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Abstract

In this work we study the effect of thin-film deposition on the quality factor (Q) of silicon nanobeam cavities. We observe an average increase in the Q of 38±31% in one sample and investigate the dependence of this increase on the initial nanobeam hole sizes. We note that this process can be used to modify cavities that have larger than optimal hole sizes following fabrication. Additionally, the technique allows the tuning of the cavity mode wavelength and the incorporation of new materials, without significantly degrading Q.

© 2012 Optical Society of America

OCIS Codes
(310.1860) Thin films : Deposition and fabrication
(310.6860) Thin films : Thin films, optical properties
(350.4238) Other areas of optics : Nanophotonics and photonic crystals

History
Original Manuscript: October 4, 2011
Revised Manuscript: December 12, 2011
Manuscript Accepted: December 12, 2011
Published: January 25, 2012

Citation
Michael Gehl, Ricky Gibson, Joshua Hendrickson, Andrew Homyk, Antti Säynätjoki, Tapani Alasaarela, Lasse Karvonen, Ari Tervonen, Seppo Honkanen, Sander Zandbergen, Benjamin C. Richards, J. D. Olitzky, Axel Scherer, Galina Khitrova, Hyatt M. Gibbs, Ju-Young Kim, and Yong-Hee Lee, "Effect of atomic layer deposition on the quality factor of silicon nanobeam cavities," J. Opt. Soc. Am. B 29, A55-A59 (2012)
http://www.opticsinfobase.org/josab/abstract.cfm?URI=josab-29-2-A55


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