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Self-aligned silicon ring resonator optical modulator with focused ion beam error correction |
JOSA B, Vol. 30, Issue 2, pp. 445-449 (2013)
http://dx.doi.org/10.1364/JOSAB.30.000445
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Abstract
Ring-resonator-based silicon optical modulators have tremendous potential for forming compact and power-efficient optical transmitters. In this paper we demonstrate high-speed modulation from a device based upon carrier depletion in a self-aligned pn junction. Furthermore, the role that focused ion beams can play in the error correction of silicon photonic devices is also demonstrated.
© 2013 Optical Society of America
OCIS Codes
(060.4080) Fiber optics and optical communications : Modulation
(130.4110) Integrated optics : Modulators
ToC Category:
Integrated Optics
History
Original Manuscript: September 28, 2012
Revised Manuscript: December 6, 2012
Manuscript Accepted: December 13, 2012
Published: January 29, 2013
Citation
D. J. Thomson, F. Y. Gardes, D. C. Cox, J.-M. Fedeli, G. Z. Mashanovich, and G. T. Reed, "Self-aligned silicon ring resonator optical modulator with focused ion beam error correction," J. Opt. Soc. Am. B 30, 445-449 (2013)
http://www.opticsinfobase.org/josab/abstract.cfm?URI=josab-30-2-445
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