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Journal of the Optical Society of Korea

Journal of the Optical Society of Korea


  • Vol. 13, Iss. 1 — Mar. 25, 2009
  • pp: 75–79

Four-beam Interference Optical System for Laser Micro- structuring Using Picosecond Laser

Ji-Whan Noh, Jae-Hoon Lee, Dong-Sig Shin, Hyon-Kee Sohn, Jeong Suh, and Jeong-Seok Oh  »View Author Affiliations

Journal of the Optical Society of Korea, Vol. 13, Issue 1, pp. 75-79 (2009)

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A four beam interference optical system for laser micro structuring using a pulse laser was demonstrated. The four beam interference optical system using a pulse laser(picosecond laser) can fabricate micro structure on mold material(NAK80) directly. Micro structure on the polymer can be reproduced economically by injection molding of the micro structure on the mold material. The four beam interference optical system was composed by the DOE(Diffractive Optical Element) and two lenses. The laser intensity distribution of four beam interference was explained by an interference optics point of view and by the image optics point of view. We revealed that both views showed the same result. The laser power distribution of a <TEX>$1{\mu}m$</TEX> peak pattern was made by the four beam interference optical system and measured by the objective lens and CCD. A <TEX>$1{\mu}m$</TEX> pitch dot pattern on the mold material was fabricated and measured by SEM(Scanning Electron Microscopy).

© 2009 Optical Society of Korea

OCIS Codes
(320.0320) Ultrafast optics : Ultrafast optics
(320.5390) Ultrafast optics : Picosecond phenomena

Original Manuscript: November 8, 2008
Revised Manuscript: January 5, 2008
Manuscript Accepted: January 6, 2008
Published: March 25, 2009

Ji-Whan Noh, Jae-Hoon Lee, Dong-Sig Shin, Hyon-Kee Sohn, Jeong Suh, and Jeong-Seok Oh, "Four-beam Interference Optical System for Laser Micro- structuring Using Picosecond Laser," J. Opt. Soc. Korea 13, 75-79 (2009)

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