OSA's Digital Library

Journal of the Optical Society of Korea

Journal of the Optical Society of Korea


  • Vol. 16, Iss. 3 — Sep. 1, 2012
  • pp: 228–235

Wavefront Sensitivity Analysis Using Global Wavefront Aberration in an Unobscured Optical System

Won-Don Joo  »View Author Affiliations

Journal of the Optical Society of Korea, Vol. 16, Issue 3, pp. 228-235 (2012)

View Full Text Article

Acrobat PDF (1283 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

  • Export Citation/Save Click for help


It is very important to analyze effectively the tolerance of an optical system with high resolution as the projection lens of photolithography or as the objective lens of a microscope. We would like to find an effective assembly structure and compensators to correct aberrations through global wavefront sensitivity analysis using Zernike polynomial expansion from the field and pupil coordinates rather than from only pupil coordinates. In this paper, we introduce global wavefront coefficients by small perturbations of the optical system, and analyze the optical performance with these coefficients. From this analysis, it is possible to see how we can enlarge the tolerance through the proper assembly structure and compensators.

© 2012 Optical Society of Korea

OCIS Codes
(080.1010) Geometric optics : Aberrations (global)
(220.1000) Optical design and fabrication : Aberration compensation
(220.1140) Optical design and fabrication : Alignment
(080.2208) Geometric optics : Fabrication, tolerancing

Original Manuscript: July 23, 2012
Revised Manuscript: July 31, 2012
Manuscript Accepted: August 2, 2012
Published: September 25, 2012

Won-Don Joo, "Wavefront Sensitivity Analysis Using Global Wavefront Aberration in an Unobscured Optical System," J. Opt. Soc. Korea 16, 228-235 (2012)

Sort:  Journal  |  Reset


References are not available for this paper.

Cited By

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited