Abstract

Rigorous coupled-wave analysis (RCWA) with a simplified eigenvalue problem is used to investigate the an-tireflective property of one-dimensional surface-relief gratings such as binary gratings, triangular gratings and gratings with triangle-like surface profiles. The convergence of RCWA is investigated by varying the number of layers and the number of space-harmonics used in the computation. For unpolarized light normally incident on a medium of refractive index 1.64 from vaccum, a triangle-like grating shows the reflectivity of <TEX>$1.6 {\times} 10^{-4}$</TEX> in contrast to a minimum reflectivity of <TEX>$3.8 {\times} 10^{-3}$</TEX> for a binary grating. We also study the dependence of reflectivity on the wavelength, and on the angle of incidence for a groove shape and depth which result in minimum reflectivity.

© 1997 Optical Society of Korea

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