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Journal of the Optical Society of Korea

Journal of the Optical Society of Korea

| PUBLISHED BY THE OPTICAL SOCIETY OF KOREA

  • Vol. 10, Iss. 4 — Dec. 25, 2006
  • pp: 178–183

Three Dimensional Shape Measurement of a Micro Fresnel Lens with In-line Phase-shifting Digital Holographic Microscopy

Jeon-Woong Kang and Chung-Ki Hong  »View Author Affiliations


Journal of the Optical Society of Korea, Vol. 10, Issue 4, pp. 178-183 (2006)


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Abstract

An in-line phase-shifting digital holographic microscopy system was constructed by inserting a conventional microscope in the object arm of a Mach-Zehnder interferometer. It was used to measure the three dimensional shape of a micro Fresnel lens. It was also shown that both the lateral and the axial resolutions of the in-line phase-shifting system using a self-calibration algorithm were superior to those of the best off-axis system.

© 2006 Optical Society of Korea

OCIS Codes
(090.2880) Holography : Holographic interferometry
(100.2000) Image processing : Digital image processing

History
Original Manuscript: November 2, 2006
Revised Manuscript: November 2, 2006
Published: December 25, 2006

Citation
Jeon-Woong Kang and Chung-Ki Hong, "Three Dimensional Shape Measurement of a Micro Fresnel Lens with In-line Phase-shifting Digital Holographic Microscopy," J. Opt. Soc. Korea 10, 178-183 (2006)
http://www.opticsinfobase.org/josk/abstract.cfm?URI=josk-10-4-178


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References

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