The wide-band spiral inductor to be monolithically integrated on the AlN substrate as a choking inductor for a compact 10 Gb/s optical transmitter applications is investigated. In order to reduce the parasitic capacitance limiting the choking bandwidth, the AlN substrate is partially etched away, which is analyzed by using an equivalent circuit model. The measured <TEX>$S_{21}$</TEX> transmission response of the fabricated inductor is suppressed as low as -10 dB in the frequency range of 5 to 16 GHz.

© 2008 Optical Society of Korea

1. XFP MSA Group, http://www.xfpmsa.org
2. Y. Keh, M. Park, Y. Kim, D. Kim, and D. Jang, “A novel 10 Gbps TO laser package,” in Proc. European Conference on Optical Communication, pp. 84-85, 2003
3. L.-H. Lu, G. E. Ponchak, P. Bhattacharya, L. P. B. Katehi, “High-Q X-band and K-band micromachined spiral inductors for use in Si-based integrated circuits,” in Dig. IEEE MTT-S Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, pp. 108-112, 2000 [CrossRef]
4. Y. Cao, R. A. Groves, X. Huang, N. D. Zamdmer, J.-O Plouchart, R. A. Wachnik, T.-J. King, and C. Hu, “Frequency-independent equivalent-circuit model for on-chip spiral inductors,” IEEE J. Solid-State Circuits, Vol. 38, No. 3, pp. 419-426, 2003 [CrossRef]
5. H. M. Greenhouse, “Design of planar rectangular microelectronic inductors,” IEEE Trans. on Parts, Hybrids, Packaging, Vol. 10, No. 2, pp. 101-109, 1974
6. C. Wu, C. C. Tang, and S. I. Liu, “Analysis of on-chip spiral inductors using the distributed capacitance model,” IEEE J. Solid-State Circuits, Vol. 38, No. 6, pp. 1040-1044, 2003 [CrossRef]

IEEE Trans. on Parts, Hybrids, Packaging

• H. M. Greenhouse, “Design of planar rectangular microelectronic inductors,” IEEE Trans. on Parts, Hybrids, Packaging, Vol. 10, No. 2, pp. 101-109, 1974

in Proc. European Conference on Optical Communication

• Y. Keh, M. Park, Y. Kim, D. Kim, and D. Jang, “A novel 10 Gbps TO laser package,” in Proc. European Conference on Optical Communication, pp. 84-85, 2003

Silicon Monolithic Integrated Circuits in RF Systems, 2000. Digest of Papers. 2000 Topical Meeting on

• L.-H. Lu, G. E. Ponchak, P. Bhattacharya, L. P. B. Katehi, “High-Q X-band and K-band micromachined spiral inductors for use in Si-based integrated circuits,” in Dig. IEEE MTT-S Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, pp. 108-112, 2000 [CrossRef]

Solid-State Circuits, IEEE Journal of

• Y. Cao, R. A. Groves, X. Huang, N. D. Zamdmer, J.-O Plouchart, R. A. Wachnik, T.-J. King, and C. Hu, “Frequency-independent equivalent-circuit model for on-chip spiral inductors,” IEEE J. Solid-State Circuits, Vol. 38, No. 3, pp. 419-426, 2003 [CrossRef]
• C. Wu, C. C. Tang, and S. I. Liu, “Analysis of on-chip spiral inductors using the distributed capacitance model,” IEEE J. Solid-State Circuits, Vol. 38, No. 6, pp. 1040-1044, 2003 [CrossRef]

Other

• XFP MSA Group, http://www.xfpmsa.org

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