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Journal of the Optical Society of Korea

Journal of the Optical Society of Korea


  • Vol. 12, Iss. 4 — Dec. 25, 2008
  • pp: 281–287

3-D Surface Profile Measurement Using An Acousto-optic Tunable Filter Based Spectral Phase Shifting Technique

Dae-Suk Kim and Yong-Jai Cho  »View Author Affiliations

Journal of the Optical Society of Korea, Vol. 12, Issue 4, pp. 281-287 (2008)

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An acousto-optic tunable filter based 3-D micro surface profile measurement using an equally spaced 5 spectral phase shifting is described. The 5-bucket spectral phase shifting method is compared with a Fourier-transform method in the spectral domain. It can provide a fast measurement capability while maintaining high accuracy since it needs only 5 pieces of spectrally phase shifted imaging data and a simple calculation in comparison with the Fourier transform method that requires full wavelength scanning data and relatively complicated computation. The 3-D profile data of micro objects can be obtained in a few seconds with an accuracy of <TEX>${\sim}10nm$</TEX>. The 3-D profile method also has an inherent benefit in terms of being speckle-free in measuring diffuse micro objects by employing an incoherent light source. Those simplicity and practical applicability is expected to have diverse applications in 3-D micro profilometry such as semiconductors and micro-biology.

© 2008 Optical Society of Korea

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6200) Instrumentation, measurement, and metrology : Spectrometers and spectroscopic instrumentation
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

Original Manuscript: September 30, 2008
Revised Manuscript: December 9, 2008
Manuscript Accepted: December 10, 2008
Published: December 31, 2008

Dae-Suk Kim and Yong-Jai Cho, "3-D Surface Profile Measurement Using An Acousto-optic Tunable Filter Based Spectral Phase Shifting Technique," J. Opt. Soc. Korea 12, 281-287 (2008)

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