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Journal of the Optical Society of Korea

Journal of the Optical Society of Korea


  • Vol. 13, Iss. 2 — Jun. 25, 2009
  • pp: 245–250

Measurement of a Mirror Surface Topography Using 2-frame Phase-shifting Digital Interferometry

Seok-Hee Jeon and Sang-Keun Gil  »View Author Affiliations

Journal of the Optical Society of Korea, Vol. 13, Issue 2, pp. 245-250 (2009)

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We propose a digital holographic interference analysis method based on a 2-frame phase-shifting technique for measuring an optical mirror surface. The technique using 2-frame phase-shifting digital interferometry is more efficient than multi-frame phase-shifting techniques because the 2-frame method has the advantage of a reduced number of interferograms, and then takes less time to acquire the wanted topography information from interferograms. In this measurement system, 2-frame phase-shifting digital interferograms are acquired by moving the reference flat mirror surface, which is attached to a piezoelectric transducer, with phase step of 0 or <TEX>$\pi$</TEX>/2 in the reference beam path. The measurements are recorded on a CCD detector. The optical interferometry is designed on the basis of polarization characteristics of a polarizing beam splitter. Therefore the noise from outside turbulence can be decreased. The proposed 2-frame algorithm uses the relative phase difference of the neighbor pixels. The experiment has been carried out on an optical mirror which flatness is less than <TEX>$\lambda$</TEX>/4. The measurement of the optical mirror surface topography using 2-frame phase-shifting interferometry shows that the peak-to-peak value is calculated to be about <TEX>$0.1779{\mu}m$</TEX>, the root-mean-square value is about <TEX>$0.034{\mu}m$</TEX>. Thus, the proposed method is expected to be used in nondestructive testing of optical components.

© 2009 Optical Society of Korea

OCIS Codes
(090.2880) Holography : Holographic interferometry
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness

Original Manuscript: April 9, 2009
Revised Manuscript: April 27, 2009
Manuscript Accepted: April 27, 2009
Published: June 25, 2009

Seok-Hee Jeon and Sang-Keun Gil, "Measurement of a Mirror Surface Topography Using 2-frame Phase-shifting Digital Interferometry," J. Opt. Soc. Korea 13, 245-250 (2009)

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