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Journal of the Optical Society of Korea

Journal of the Optical Society of Korea

| PUBLISHED BY THE OPTICAL SOCIETY OF KOREA

  • Vol. 14, Iss. 2 — Jun. 25, 2010
  • pp: 127–130

Development and Evaluation of an Electron Beam Source for Microscopy and Its Applications

Seung-Joon Ahn, Tae-Sik Oh, Ho-Seob Kim, and Seong-Joon Ahn  »View Author Affiliations


Journal of the Optical Society of Korea, Vol. 14, Issue 2, pp. 127-130 (2010)


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Abstract

We have developed an efficient electron beam (e-beam) source, a microcolumn, that can be used as a source module for of microscopy and its applications. To obtain a low operating voltage, a very sharp cold field electron emitter was developed by electrochemically etching a tungsten wire. Laser diffraction was used for the fabrication of high-quality electron lenses and for their precise alignment. The measurement of the e-beam currents, and SEM images captured by the microcolumn confirmed the potential of the device as a very good e-beam source.

© 2010 Optical Society of Korea

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(180.5810) Microscopy : Scanning microscopy
(220.4000) Optical design and fabrication : Microstructure fabrication
(040.2235) Detectors : Far infrared or terahertz

History
Original Manuscript: January 29, 2010
Revised Manuscript: March 30, 2010
Manuscript Accepted: March 30, 2010
Published: June 25, 2010

Citation
Seung-Joon Ahn, Tae-Sik Oh, Ho-Seob Kim, and Seong-Joon Ahn, "Development and Evaluation of an Electron Beam Source for Microscopy and Its Applications," J. Opt. Soc. Korea 14, 127-130 (2010)
http://www.opticsinfobase.org/josk/abstract.cfm?URI=josk-14-2-127


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References

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