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Journal of the Optical Society of Korea

Journal of the Optical Society of Korea


  • Vol. 14, Iss. 2 — Jun. 25, 2010
  • pp: 127–130

Development and Evaluation of an Electron Beam Source for Microscopy and Its Applications

Seung-Joon Ahn, Tae-Sik Oh, Ho-Seob Kim, and Seong-Joon Ahn  »View Author Affiliations

Journal of the Optical Society of Korea, Vol. 14, Issue 2, pp. 127-130 (2010)

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We have developed an efficient electron beam (e-beam) source, a microcolumn, that can be used as a source module for of microscopy and its applications. To obtain a low operating voltage, a very sharp cold field electron emitter was developed by electrochemically etching a tungsten wire. Laser diffraction was used for the fabrication of high-quality electron lenses and for their precise alignment. The measurement of the e-beam currents, and SEM images captured by the microcolumn confirmed the potential of the device as a very good e-beam source.

© 2010 Optical Society of Korea

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(180.5810) Microscopy : Scanning microscopy
(220.4000) Optical design and fabrication : Microstructure fabrication
(040.2235) Detectors : Far infrared or terahertz

Original Manuscript: January 29, 2010
Revised Manuscript: March 30, 2010
Manuscript Accepted: March 30, 2010
Published: June 25, 2010

Seung-Joon Ahn, Tae-Sik Oh, Ho-Seob Kim, and Seong-Joon Ahn, "Development and Evaluation of an Electron Beam Source for Microscopy and Its Applications," J. Opt. Soc. Korea 14, 127-130 (2010)

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  1. S.-S. Choi, J. S. Kim, E. D. Fabrizio, M. Gentili, H. B. Chung, H. J. Yoo, and B. W. Kim, “A novel X-ray mask for mix-and-match of optical and X-ray lithography applied in SOI device fabrication,” J. Korean Phys. Soc. 32, 727-730(1998).
  2. S. Kwon, P. Kim, S. Jeong, W. Chang, C. Chun, and D.-Y. Kim, “Fabrication of nano dot and line arrays using NSOM lithography,” J. Opt. Soc. Korea 9, 16-21 (2005). [CrossRef]
  3. D.-G. Kim, S.-Y. Woo, D.-K. Kim, T.-Y. Hwang, S.-H. Park, and D. Y. Kim, “Generation of 1.5 Gbps pseudorandom binary sequence optical signals by using a gain switched Fabry-Perot semiconductor laser,” J. Opt. Soc. Korea9, 103-106 (2005). [CrossRef]
  4. C. Kang, C.-S. Kee, I.-B. Sohn, and J. Lee, “Spectral properties of THz-periodic metallic structures,” J. Opt. Soc. Korea 12, 196-199 (2008). [CrossRef]
  5. H. Jeong, J. Jeong, G. H. Song, and Y.-D. Jho, “Excitation wavelength dependence of terahertz radiation from InAs: UV versus IR,” J. Korean Phys. Soc. 56, 262-264 (2010). [CrossRef]
  6. N. E. Yu, C. Kang, H. K. Yoo, C. Jung, Y. L. Lee, C.-S. Kee, D.-K. Ko, and J. Lee, “Temperature dependent terahertz generation at periodically poled stoichiometric lithium tantalate crystal using femtosecond laser pulses,” J. Opt. Soc. Korea 12, 200-204 (2008). [CrossRef]
  7. M. L. Yu, B. W. Hussey, H.-S. Kim, and T. H. P. Chang, “Emission characteristics of ultrasharp cold field emitters,” J. Vac. Sci. Technol. B 12, 3431-3435 (1994). [CrossRef]
  8. H. S. Kim, M. L. Yu, E. Kratschmer, B. W. Hussey, M. G. R. Thomson, and T. H. P. Chang, “Miniature Schottky electron source,” J. Vac. Sci. Technol. B 13, 2468-2472 (1995). [CrossRef]
  9. E. Kratschmer, H. S. Kim, M. G. R. Thomson, K. Y. Lee, S. A. Rishton, M. L. Yu, S. Zolgharnain, B. W. Hussey, and T. H. P. Chang, “Experimental evaluation of a <TEX>$20{\times}20$</TEX> mm footprint microcolumn,” J. Vac. Sci. Technol. B 14, 3792-3796 (1996). [CrossRef]
  10. S. Ahn, D. W. Kim, H. S. Kim, C. G. Park, and S. J. Ahn, “Study on the precise alignment of micro-lenses in the microcolumn by using the laser diffraction pattern,” Mat. Sci. Forum 544-545, 845-848 (2007). [CrossRef]
  11. M. L. Yu, H.-S. Kim, B. W. Hussey, T. H. P. Chang, and W. A. Mackie, “Energy distributions of field emitted electrons from carbide tips and tungsten tips with diamondlike carbon coatings,” J. Vac. Sci. Technol. B 14, 3797-3801 (1996). [CrossRef]

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