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Optica Publishing Group
  • Journal of the Optical Society of Korea
  • Vol. 14,
  • Issue 2,
  • pp. 127-130
  • (2010)

Development and Evaluation of an Electron Beam Source for Microscopy and Its Applications

Open Access Open Access

Abstract

We have developed an efficient electron beam (e-beam) source, a microcolumn, that can be used as a source module for of microscopy and its applications. To obtain a low operating voltage, a very sharp cold field electron emitter was developed by electrochemically etching a tungsten wire. Laser diffraction was used for the fabrication of high-quality electron lenses and for their precise alignment. The measurement of the e-beam currents, and SEM images captured by the microcolumn confirmed the potential of the device as a very good e-beam source.

© 2010 Optical Society of Korea

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