This paper describes the surface form measurement of a spherical smooth surface by using single shot off-axis Fizeau interferometry. The demodulated phase map is obtained and unwrapped to remove the <TEX>$2\pi$</TEX> ambiguity. The unwrapped phase map is converted to height and the 3D surface height of the surface object is reconstructed. The results extracted from the single shot off-axis geometry are compared with the results extracted from four-frame phase shifting in-line interferometry, and the results are in excellent agreement.
© 2010 Optical Society of Korea
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
Original Manuscript: October 5, 2010
Revised Manuscript: November 19, 2010
Manuscript Accepted: November 19, 2010
Published: December 25, 2010
Dahi Ghareab Abdelsalam, Byung-Joon Baek, Yong-Jai Cho, and Dae-Suk Kim, "Surface Form Measurement Using Single Shot Off-axis Fizeau Interferometry," J. Opt. Soc. Korea 14, 409-414 (2010)
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