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Journal of the Optical Society of Korea

Journal of the Optical Society of Korea

| PUBLISHED BY THE OPTICAL SOCIETY OF KOREA

  • Vol. 14, Iss. 4 — Dec. 25, 2010
  • pp: 409–414

Surface Form Measurement Using Single Shot Off-axis Fizeau Interferometry

Dahi Ghareab Abdelsalam, Byung-Joon Baek, Yong-Jai Cho, and Dae-Suk Kim  »View Author Affiliations


Journal of the Optical Society of Korea, Vol. 14, Issue 4, pp. 409-414 (2010)


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Abstract

This paper describes the surface form measurement of a spherical smooth surface by using single shot off-axis Fizeau interferometry. The demodulated phase map is obtained and unwrapped to remove the <TEX>$2\pi$</TEX> ambiguity. The unwrapped phase map is converted to height and the 3D surface height of the surface object is reconstructed. The results extracted from the single shot off-axis geometry are compared with the results extracted from four-frame phase shifting in-line interferometry, and the results are in excellent agreement.

© 2010 Optical Society of Korea

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

History
Original Manuscript: October 5, 2010
Revised Manuscript: November 19, 2010
Manuscript Accepted: November 19, 2010
Published: December 25, 2010

Citation
Dahi Ghareab Abdelsalam, Byung-Joon Baek, Yong-Jai Cho, and Dae-Suk Kim, "Surface Form Measurement Using Single Shot Off-axis Fizeau Interferometry," J. Opt. Soc. Korea 14, 409-414 (2010)
http://www.opticsinfobase.org/josk/abstract.cfm?URI=josk-14-4-409


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