This paper describes the surface form measurement of a spherical smooth surface by using single shot off-axis Fizeau interferometry. The demodulated phase map is obtained and unwrapped to remove the <TEX>$2\pi$</TEX> ambiguity. The unwrapped phase map is converted to height and the 3D surface height of the surface object is reconstructed. The results extracted from the single shot off-axis geometry are compared with the results extracted from four-frame phase shifting in-line interferometry, and the results are in excellent agreement.
© 2010 Optical Society of Korea
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
Original Manuscript: October 5, 2010
Revised Manuscript: November 19, 2010
Manuscript Accepted: November 19, 2010
Published: December 25, 2010
Dahi Ghareab Abdelsalam, Byung-Joon Baek, Yong-Jai Cho, and Dae-Suk Kim, "Surface Form Measurement Using Single Shot Off-axis Fizeau Interferometry," J. Opt. Soc. Korea 14, 409-414 (2010)
References are not available for this paper.
OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.