An advanced microcolumn is proposed which adopts a modified einzel lens structure. The newly designed einzel lens is composed of four electrodes. The two center electrodes are specially designed electrostatic quadrupole (EQ) einzel lenses having keyhole instead of circular apertures. We constructed the advanced microcolumn with the EQ-einzel lenses, and operated the newly designed microcolumn in single lens mode and double-lens mode. The preliminary results show that the EQ-einzel lens can improve the performance of the micro-column for large sample applications.
© 2011 Optical Society of Korea
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(180.5810) Microscopy : Scanning microscopy
(220.4000) Optical design and fabrication : Microstructure fabrication
Original Manuscript: September 23, 2011
Revised Manuscript: December 1, 2011
Manuscript Accepted: December 5, 2011
Published: December 25, 2011
Tae-Sik Oh, Sang-Won Jin, Sang-Kuk Choi, Young-Chul Kim, Dae-Wook Kim, Seung-Joon Ahn, Young-Bok Lee, and Ho-Seob Kim, "Experimental Study on the Operation of a Keyhole-Shaped Lens in a Microcolumn," J. Opt. Soc. Korea 15, 368-372 (2011)
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