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Journal of the Optical Society of Korea

Journal of the Optical Society of Korea


  • Vol. 16, Iss. 3 — Sep. 1, 2012
  • pp: 221–227

Optical Proximity Corrections for Digital Micromirror Device-based Maskless Lithography

Jung-Yu Hur and Man-Seung Seo  »View Author Affiliations

Journal of the Optical Society of Korea, Vol. 16, Issue 3, pp. 221-227 (2012)

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We propose optical proximity corrections (OPCs) for digital micromirror device (DMD)-based maskless lithography. A pattern writing scheme is analyzed and a theoretical model for obtaining the dose distribution profile and resulting structure is derived. By using simulation based on this model we were able to reduce the edge placement error (EPE) between the design width and the critical dimension (CD) of a fabricated photoresist, which enables improvement of the CD. Moreover, by experiments carried out with the parameter derived from the writing scheme, we minimized the corner-rounding effect by controlling light transmission to the corners of a feature by modulating a DMD.

© 2012 Optical Society of Korea

OCIS Codes
(110.3960) Imaging systems : Microlithography
(220.3740) Optical design and fabrication : Lithography
(220.4000) Optical design and fabrication : Microstructure fabrication
(070.6120) Fourier optics and signal processing : Spatial light modulators

Original Manuscript: August 8, 2012
Revised Manuscript: August 24, 2012
Manuscript Accepted: August 24, 2012
Published: September 25, 2012

Jung-Yu Hur and Man-Seung Seo, "Optical Proximity Corrections for Digital Micromirror Device-based Maskless Lithography," J. Opt. Soc. Korea 16, 221-227 (2012)

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