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Journal of the Optical Society of Korea

Journal of the Optical Society of Korea

| PUBLISHED BY THE OPTICAL SOCIETY OF KOREA

  • Vol. 17, Iss. 5 — Oct. 1, 2013
  • pp: 415–422

Fringe-Order Determination Method in White-Light Phase-Shifting Interferometry for the Compensation of the Phase Delay and the Suppression of Excessive Phase Unwrapping

SeongRyong Kim, JungHwan Kim, and HeuiJae Pahk  »View Author Affiliations


Journal of the Optical Society of Korea, Vol. 17, Issue 5, pp. 415-422 (2013)


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Abstract

White-light phase-shifting interferometry (WLPSI) is widely recognized as a standard method to measure shapes with high resolution over a long distance. In practical applications, WLPSI, however, is associated with some degree of ambiguity of its phase, which occurs due to a phase delay, which is the offset between the phase of the fringes and the fringe envelope peak position. In this paper, a new algorithm is proposed for the determination of a fringe order suitable for samples in which the phase delay mainly occurs due to noise, diffraction and a steep angle. The concepts of the decouple factor and the connectivity are introduced and a method for calculating the decouple factor and the connectivity is developed. With the phase-unwrapping procedure which considers these values, it is demonstrated that our algorithm determines the correct fringe order. To verify the performance of the algorithm, a simulation was performed with the virtual step height under noise. Some specimens such as step height standard and a column spacer with a steep angle are also measured with a Mirau interference microscope, after which the algorithm is shown to be effective and robust.

© 2013 Optical Society of Korea

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry

History
Original Manuscript: July 16, 2013
Revised Manuscript: September 23, 2013
Manuscript Accepted: September 24, 2013
Published: October 25, 2013

Citation
SeongRyong Kim, JungHwan Kim, and HeuiJae Pahk, "Fringe-Order Determination Method in White-Light Phase-Shifting Interferometry for the Compensation of the Phase Delay and the Suppression of Excessive Phase Unwrapping," J. Opt. Soc. Korea 17, 415-422 (2013)
http://www.opticsinfobase.org/josk/abstract.cfm?URI=josk-17-5-415


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