Self-Compensation of PZT Errors in White Light Scanning Interferometry
Journal of the Optical Society of Korea, Vol. 3, Issue 2, pp. 35-40 (1999)
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Abstract
One of main error sources in white light scanning interferometry is the inaccuracy of scanning mechanisms in that PZT(piezoelectric transducer) micro-actuators are preferably used. We propose a new calibration method that is capable of identifying actual scanning errors directly by analyzing the spectral distribution of sampled interferograms. This calibration provides an effective means of self-compensation for the non-linearity errors caused by PZT hysteresis, enhancing the measurement uncertainty to a level of 5 nanometers over an entire measuring range of 100 <TEX>${\mu}{\textrm}{m}$</TEX>.
© 1999 Optical Society of Korea
History
Original Manuscript: February 23, 1999
Published: September 1, 1999
Citation
Min-Gu Kang, Sang-Yoon Lee, and Seong-Woo Kim, "Self-Compensation of PZT Errors in White Light Scanning Interferometry," J. Opt. Soc. Korea 3, 35-40 (1999)
http://www.opticsinfobase.org/josk/abstract.cfm?URI=josk-3-2-35
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