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Journal of the Optical Society of Korea

Journal of the Optical Society of Korea


  • Vol. 3, Iss. 2 — Sep. 30, 1999
  • pp: 35–40

Self-Compensation of PZT Errors in White Light Scanning Interferometry

Min-Gu Kang, Sang-Yoon Lee, and Seong-Woo Kim  »View Author Affiliations

Journal of the Optical Society of Korea, Vol. 3, Issue 2, pp. 35-40 (1999)

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One of main error sources in white light scanning interferometry is the inaccuracy of scanning mechanisms in that PZT(piezoelectric transducer) micro-actuators are preferably used. We propose a new calibration method that is capable of identifying actual scanning errors directly by analyzing the spectral distribution of sampled interferograms. This calibration provides an effective means of self-compensation for the non-linearity errors caused by PZT hysteresis, enhancing the measurement uncertainty to a level of 5 nanometers over an entire measuring range of 100 <TEX>${\mu}{\textrm}{m}$</TEX>.

© 1999 Optical Society of Korea

Original Manuscript: February 23, 1999
Published: September 1, 1999

Min-Gu Kang, Sang-Yoon Lee, and Seong-Woo Kim, "Self-Compensation of PZT Errors in White Light Scanning Interferometry," J. Opt. Soc. Korea 3, 35-40 (1999)

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