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Journal of the Optical Society of Korea

Journal of the Optical Society of Korea


  • Vol. 5, Iss. 2 — Jun. 30, 2001
  • pp: 60–66

Development of Prototype Stylus Prototype for Large Optics Testing

Ho-Soon Yang and David Walker  »View Author Affiliations

Journal of the Optical Society of Korea, Vol. 5, Issue 2, pp. 60-66 (2001)

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The authors discuss a prototype stylus profilometer designed to measure large optics. It consists of a low contact force type probe system, laser reference system, interferometric distance measurement system, and horizontal driving system. The probe contacts the surface ; the height and the horizontal distances of the measurement points are measured by the interferometer. The freely propagated laser beam provides the reference line during the measurement. The developed stylus profilometry shows only <TEX>$\pm$</TEX>60 nm of P-V error for the 157 mm diameter spherical mirror.

© 2001 Optical Society of Korea

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

Original Manuscript: December 15, 2000
Published: June 1, 2001

Ho-Soon Yang and David Walker, "Development of Prototype Stylus Prototype for Large Optics Testing," J. Opt. Soc. Korea 5, 60-66 (2001)

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