Volumetric Interferometry Using Spherical Wave Interference for Three-dimensional Coordinate Metrology
Journal of the Optical Society of Korea, Vol. 5, Issue 4, pp. 140-145 (2001)
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Abstract
We present a new method of volumetric interferometer, which is intended to measure the three-dimensional coordinates of a moving object in a simultaneous way with a single optical setup. The method is based on the principles of phase-measuring interferometry with phase shifting. Two diffraction point sources, which are made of the polished ends of single-mode optical fibers are embedded on the object. Two spherical wavefronts emanate from the diffraction point sources and interfere with each other within the measurement volume. One wavefront is phase-shifted by elongating the corresponding fiber using a PZT extender. A CCD array sensor fixed at the stationary measurement station detects the resulting interference field. The measured phases are then related to the three-dimensional location of the object with a set of non-liner equations of Euclidean distance, from which the complete set of three-dimensional spatial coordinates of the object is determined through rigorous numerical computation based upon the least square error minimization.
© 2001 Optical Society of Korea
OCIS Codes
(060.2380) Fiber optics and optical communications : Fiber optics sources and detectors
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
History
Original Manuscript: September 10, 2001
Published: December 1, 2001
Citation
Hyug-Gyo Rhee, Ji-Young Chu, and Seung-Woo Kim, "Volumetric Interferometry Using Spherical Wave Interference for Three-dimensional Coordinate Metrology," J. Opt. Soc. Korea 5, 140-145 (2001)
http://www.opticsinfobase.org/josk/abstract.cfm?URI=josk-5-4-140
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