OSA's Digital Library

Journal of the Optical Society of Korea

Journal of the Optical Society of Korea

| PUBLISHED BY THE OPTICAL SOCIETY OF KOREA

  • Vol. 8, Iss. 1 — Mar. 25, 2004
  • pp: 21–28

Fabrication of Micro-Photonic Component in Silica Glass with Femtosecond Laser Pulses

Wataru Watanabe and Kazuyoshi Itoh  »View Author Affiliations


Journal of the Optical Society of Korea, Vol. 8, Issue 1, pp. 21-28 (2004)


View Full Text Article

Acrobat PDF (716 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations
  • Export Citation/Save Click for help

Abstract

When femtosecond laser pulses are focused inside the bulk of transparent materials, the intensity in the focal volume becomes high enough to produce permanent structural modifications. This technique has been applied to fabricate three-dimensional photonic structures such as optical memory, waveguides, gratings, and couplers inside a wide variety of transparent materials. In this paper, we review the fabrication of optical elements in glasses with femtosecond laser pulses, including the fabrication of waveguides, couplers, Bragg gratings, zone plates, holographic memory, and micro holes.

© 2004 Optical Society of Korea

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(130.3120) Integrated optics : Integrated optics devices
(140.3330) Lasers and laser optics : Laser damage
(140.3440) Lasers and laser optics : Laser-induced breakdown
(190.7110) Nonlinear optics : Ultrafast nonlinear optics
(320.7110) Ultrafast optics : Ultrafast nonlinear optics

History
Original Manuscript: December 11, 2003
Published: March 1, 2004

Citation
Wataru Watanabe and Kazuyoshi Itoh, "Fabrication of Micro-Photonic Component in Silica Glass with Femtosecond Laser Pulses," J. Opt. Soc. Korea 8, 21-28 (2004)
http://www.opticsinfobase.org/josk/abstract.cfm?URI=josk-8-1-21


Sort:  Year  |  Journal  |  Reset

References

  1. M. E. Fermann, A. Galvanauskas, G. Sucha, Ultrafast Lasers (Marcel Dekker, New York, 2003)
  2. K. Hirao, T. Mitsuyu, J. Si, and J. Qiu, Active Glass for Photonic Devices (Springer- Verlag, Berlin, 2001)
  3. K. Itoh and W. Watanabe, "Toward nano- and micro-processing in glass with femtosecond laser pulses,"RIKEN Review, vol. 50, pp. 90-94, 2003
  4. K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao,"Writing waveguides in glass with a femtosecond laser," Opt. Lett. vol. 21, 1729, 1996 [CrossRef]
  5. K. Yamada, W. Watanabe, T. Toma, J. Nishii, and K. Itoh, "In situ observation of photoinduced refractive index changes in filaments formed in glasses by femtosecond laser pulses," Opt. Lett. vol. 26, 19, 2001 [CrossRef]
  6. C. B. Schaffer, A. Brodeur, J. F. Garcia, and E. Mazur, "Micromachining bulk glass by use of femtosecond laser pulses with nanojoule energy," Opt. Lett. vol. 26, 93, 2001 [CrossRef]
  7. M. Will, S. Nolte, B. N. Chichkov, and A. TueIlllermarm, "Optical properties of waveguides fabricated in fused silica by femtosecond laser pulses," Appl. Opt. vol. 41, 4360, 2002 [CrossRef]
  8. S. Nolte, M. Will, J. Burghoff, and A. Tuennermann, "Femtosecond waveguide writing: a new avenue to three-dimensional integrated optics," Appl. Phys A. vol. 77, 109, 2003 [CrossRef]
  9. A. Saliminia, N. T. Nguyen, M. -C. Nadeau, S. Petit, S. L. Chin, and R. Vallee, "Writing optical waveguides in fused silica using 1 kHz femtosecond infrared pulses," J. Appl. Phys. vol. 93, 3724, 2003 [CrossRef]
  10. G. Cerullo, R. Osellame, S. Taccheo, M. Marangoni, D. Polli, R. Ramponi, P. Laporta and S. De Silvestri, "Femtosecond micromachining of symmetric waveguides at <TEX>$1.5 {\mu}m$</TEX> by astigmatic beam focusing," Opt. Lett. vol. 27, 1938, 2002 [CrossRef]
  11. Y. Tokuda, M. Saito, M. Takahashi, K Yamada, W. Watanabe, K. Itoh, and T. Yoko, "Waveguide formation in niobium tellurite glasses by pico- and femtosecond laser pulses," J. Non-Cryst. Solids. vol. 326&327, 472, 2003 [CrossRef]
  12. D. Homoelle, W. Wielandy, A. L. Gaeta, E. F. Borrelli, and C. Smith, "Infrared photosensitivity in silica glasses exposed to femtosecondlaser pulses," Opt. Lett. vol. 24, 1311, 1999 [CrossRef]
  13. A. M. Streltsov and N. F. Borrelli, "Fabrication and analysis of a directional coupler written in glass by nanojoule femtosecond laser pulses," Opt. Lett. vol. 26, pp. 42-44, 2001 [CrossRef]
  14. K. Minoshima, A. M. Kowalevicz, I. Hartl, E. P. Ippen, and J. G. Fujimoto, "Photonic device fabrication in glass by use of nonlinear materials processing with a femtosecond laser oscillator," Opt. Lett. vol. 26, 1516, 2001 [CrossRef]
  15. K. Minoshima, A. M. Kowalevicz, E. P. Ippen, and J. G. Fujimoto, "Fabrication of coupled mode photonic devices in glass by nonlinear femtosecond laser materials processing," Opt. Express. vol. 10, 645, 2002.
  16. W. Watanabe, T. Asano, K. Yamada, K. Itoh, J. Nishii, "Wavelength division using three-dimensional couplers fabricated by filament at ion of femtosecond laser pulses,"Opt. Lett. vol. 28, 2491, 2003. [CrossRef]
  17. K Yamada, W. Watanabe, J. Nishii, and K Itoh, "Anisotropic refractive-index change in silica glass induced by self-trapped filament of linearly polarized femtosecond laser pulses," J. Appl. Phys. vol. 93, 1889, 2003. [CrossRef]
  18. K Yamada, W. Watanabe, K. Kintaka, J. Nishii, and K. Itoh, "Volume grating induced by a self-trapped long filament of femtosecond laser pulses in silica glass," Jpn. J. Appl. Phys. vol. 42, 6916, 2003.
  19. L. Sudrie, M. Franco, B. Prade, and A. Mysyrowicz, "Writing of permanent birefringent microlayers in bulk fused silica with femtosecond laser pulses," Opt. Commun. vol. 171, 279, 1999. [CrossRef]
  20. Y. Li, W. Watanabe, K Yamada, T. Shinagawa, and K. Itoh, J. Nishii, and Y. Jiang, "Holographic fabrication of multiple layers of grating inside soda-lime glass with femtosecond laser pulses," Appl. Phys. Lett. vol. 80, 1508, 2002. [CrossRef]
  21. K. Kawamura, T. Ogawa, N. Sarukura, M. Hirano, and H. Hosono, "Fabrication of surface relief gratings on transparent dielectric materials by two-beam holographic method using infrared femtosecond laser pulses," Appl. Phys. B: Lasers Opt. vol. 71, 119, 2000. [CrossRef]
  22. K. Kawamura, M. Hirano, T. Kamiya, and H. Hosono, "Holographic writing of volwne-type microgratings in silica glass by a single chirped laser pulse," Appl. Phys. Lett. vol. 81, 1137, 2002. [CrossRef]
  23. Y. Li, W. Watanabe, K. Itoh, and X. Sun, "Holographic data storage on nonsensitive glass with a single femtosecond laser pulse", Appl. Phys. Lett. vol. 81, 1952, 2002.
  24. Y. Li, K. Yamada, T. Ishizuka, W. Watanabe, K. Itoh, and Z. Zhou, "Single femtosecond pulse holography using polymethyl methacrylate," Opt. Express. vol. 10, 1173, 2002.
  25. E. N. Glezer, M. Milosavljevic, L. Huang, R. J. Finlay, T.-H. Her, J. P. Callan, and E. Mazur, "Three-dimensional optical storage inside transparent materials," Opt. Lett. vol. 21, 2023, 1996. [CrossRef]
  26. E. N. Glezer and E. Mazur, "Ultrafast-laser driven microexplosions in transparent materials," Appl. Phys. Lett. vol. 71, 882, 1997. [CrossRef]
  27. W. Watanabe, T. Toma, K. Yamada, J. Nishii, K Hayashi, and K Itoh, "Optical seizing and merging of voids in silica glass with infrared femtosecond laser pulses," Opt. Lett. vol. 25, 1669, 2000. [CrossRef]
  28. W. Watanabe and K. Itoh, "Motion of bubble in solid by femtosecond laser pulses," Opt. Express. vol. 10, 603, 2002.
  29. W. Watanabe, D. Kuroda, K Itoh, and J. Nishii, "Fabrication of Fresnel zone plate embedded in silica glass by femtosecond laser pulses," Opt. Express. vol. 10, 978, 2002.
  30. E. Bricchi, J. D. Mills, P. G. Kazansky, B. G. Klappauf, and J. J. Baumberg, "Birefringent Fresnel zone plates in silica fabricated by femtosecond laser machining," Opt. Lett. vol. 27, 2200, 2002. [CrossRef]
  31. Y. Kondo, J. Qiu, T. Mitsuyu, K Hirao, and T. Yoko, "Three-dimensional microdrilling of glass by multiphoton process and chemical etching," Jpn. J. Appl. Phys. vol. 38, L1146, 1999.
  32. A. Marcinkevicius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, "Femtosecond laser-assisted three-dimensional microfabrication in silica," Opt. Lett. vol. 26, 277, 2001. [CrossRef]
  33. M. Masuda, K. Sugioka, Y. Cheng, N. Aoki, M. Kawachi, K. Shihoyama, K. Toyoda, A. Helvajian, and K Midorikawa, "3-D microstructuring inside photosensitive glass by femtosecond laser excitation," Appl. Phys. A vol. 76, 857, 2003.
  34. Y. Li, Ki Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Jiang, "Three-dimensional hole drilling of silica glass from rear surface with femtosecond laser pulses," Opt. Lett. vol. 26, 1912, 2001.
  35. S.-H. Cho, H. Kumagai, 1. Yokota, K. Midorikawa and M. Obara, "Observation of self-chaIllleled plasma formation and bulk modification in optical fibers using high-intensity femtosecond laser," Jpn. J. Appl. Phys. vol. 37, L737, 1998. [CrossRef]
  36. W. Liu, O. Kosareva, 1. S. Golubutsov, A. Iwasaki, A. Becker, V. P. Kandidove, and S. L. Chin, "Random deflection of the white light beam during self-focusing and filament at ion of femtosecond laser pulses in water," Appl. Phys. B vol. 75, 595, 2002. [CrossRef]
  37. K. Okamoto, Fundamentals of optical waveguides (Academic Press, San Diego, 2000) Chapter 4.
  38. D. Marcuse, Light transmission optics (Van Nostrand Reinhold, New York, 1972).
  39. R. S. Taylor, C. Hnarovsky, E. Simova, D. M. Rayner, M. Mehandale, V. R. Bhardwaj, and P. B. Corkum,"Untra-high resolutin index of refraction profiles of femtosecond laser modified silica glass," Opt. Express. vol. 11, 775, 2003. [CrossRef]
  40. E. Hecht: Optics (Addison Wesley, San Francisco, 2002) 4th ed., Chap. 10, p. 443.
  41. H. Kogelnik, "Coupled wave theory for thick hologram gratings," Bell Sys. Tech. J. vol. 48, 1969, 2909.

Cited By

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited