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Journal of the Optical Society of Korea

Journal of the Optical Society of Korea


  • Vol. 8, Iss. 3 — Sep. 25, 2004
  • pp: 127–131

Femtosecond Micromachining Applications for Optical Devices

Ik-Bu Sohn, Man-Seop Lee, and Jeong-Sik Woo  »View Author Affiliations

Journal of the Optical Society of Korea, Vol. 8, Issue 3, pp. 127-131 (2004)

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This paper investigates applications of femtosecond lasers for the micromachining of transparent materials and fabrication of optical devices. We show commercial micromachining examples of transparent materials which have been fabricated for various applications. Near infrared femtosecond laser processing is an attractive method to fabricate three-dimensional optical waveguides into various transparent materials. Focused femtosecond laser pulses induce a permanent refractive-index change only near the focal point. We also demonstrate a Y coupler with the splitting ratio of 1:1 written by femtosecond laser pulses into a fused silica glass. The minimum propagation loss of 0.8 ㏈/㎝ awl the refractive-index change of 0.006-0.01 at the wavelength of 1550 ㎚ were achieved by optimization of the laser fluence.

© 2004 Optical Society of Korea

OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(220.4610) Optical design and fabrication : Optical fabrication
(230.1360) Optical devices : Beam splitters
(230.7370) Optical devices : Waveguides

Original Manuscript: April 28, 2004
Published: September 1, 2004

Ik-Bu Sohn, Man-Seop Lee, and Jeong-Sik Woo, "Femtosecond Micromachining Applications for Optical Devices," J. Opt. Soc. Korea 8, 127-131 (2004)

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  1. S. Juodkazis, S. Matsuo, H. Misawa, V. Mizeikis, A. Marcinkevicius, H. B. Sun, Y. Tokuda, M. Takahashi, T. Yoko, and J. Nishii, "Application of femtosecond laser pulses for microfabrication of transparent media," Applied Surface Science, vol. 197-198, pp. 705-709, 2002 [CrossRef]
  2. T. Juhasz, F. H. Loesel, R. M. Kurtz, C. Horvath, J. F. Bille, and G. Moruou, "Corneal refractive surgery with femtosecond lasers," IEEE J. Quantum Electron., vol. 5, no. 4, pp. 902-910, 1999 [CrossRef]
  3. K. H. Leong, A. A. Said, and R. L. Maynard, "Femtosecond micromachining applications for electro-optic components," in Electronic Components and Technology Conference, IEEE, vol. 29, pp. 210-214, 200l [CrossRef]
  4. W. Rudolph, P. Dorn, X. Liu, N. Vretenar, and R. Stock, "Microscopy with femtosecond laser pulses: applications in engineering, physics and biomedicine," Applied Surface Science, vol. 9614, pp. 1-6, 2003 [CrossRef]
  5. A. Salleo, T. Sands, and F. Y. Genin, "Machining of transparent materials using an IR and UV nanosecond pulsed laser," Appl. Phys. A, vol. 71, pp. 601-608, 2000 [CrossRef]
  6. J. Zhang, K. Sugioka, and K. Midorikawa, "High-quality and high-efficiency machining of glass materials by laser-induced plasma-assisted ablation using conventional nanosecond UV, visible, and infrared lasers," Appl. Phys. A, vol. 69, pp. 879-882, 1999 [CrossRef]
  7. R. Teghil, L. D"Alessio, A. Santagata, M. Zaccagnino, D. Ferro, and D. J. Sordelet, "Picosecond and femtosecond pulsed laser ablation and deposition of quasicrystals," Applied Surface Science, vol. 210, pp. 307-317, 2003 [CrossRef]
  8. M. R. Kasaai, V. Kacham, F. Theberge, and S. L. Chin, "The interaction of femtosecond and nanosecond laser pulses with the surface of glass," J. Non-Crystalline Solids, vol. 319, pp. 129-135, 2003 [CrossRef]
  9. K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, "Photowritten optical waveguides in various glasses with ultrashort pulse laser," Appl. Phys. Lett., vol. 71, no. 23, pp. 3329-3331, 1997 [CrossRef]
  10. K. Hirao and K. Miura, "Writing waveguides and gratings in silica and related materials by a femtosecond laser," J. Non-Cryst. Solids, vol. 239, pp. 91-95, 1998 [CrossRef]
  11. Y. Kondo, K. Nouchi, T. Mitsuyu, M. Watanabe, P. Kazansky, and K. Hirao, "Fabrication of long-period fiber gratings by focused irradiation of infrared femtosecond laser pulses," Optics Lett., vol. 24, no. 10, pp. 646-1648, 1999 [CrossRef]
  12. Y. Sikorski, A. A. Said, P. Bado, R. Maynard, C. Flrea, and D. K. Killinger, "Optical waveguide amplifier in Nd-doped glass written with near-IR femtosecond laser pulses," Electron. Lett., vol. 36, pp. 396-398, 2000 [CrossRef]
  13. D. Homoelle, S. Wielandy, and A. Gaeta, "Infrared photosensitivity in silica glasses exposed to femtosecond laser pulses," Opt. Lett., vol. 24, no. 18, pp. 1311-1313, 1999 [CrossRef]

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