This paper proposes a method of diffraction monitoring based on illuminating the test object with a pair of wave fronts propagating at an angle to each other. It is established that such illumination results in the formation of a moiré pattern whose form is associated with the geometrical parameters of the test object. The possibility of using this method to monitor the thickness of objects is considered.
© 2010 Optical Society of America
V. N. Nazarov and A. N. Ivanov, "Using the moiré effect to create high-accuracy diffraction systems for monitoring the geometrical parameters of objects," J. Opt. Technol. 77, 280-283 (2010)