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Journal of Optical Technology

Journal of Optical Technology

| SIMULTANEOUS RUSSIAN-ENGLISH PUBLICATION

  • Vol. 77, Iss. 4 — Apr. 1, 2010
  • pp: 280–283

Using the moiré effect to create high-accuracy diffraction systems for monitoring the geometrical parameters of objects

V. N. Nazarov and A. N. Ivanov  »View Author Affiliations


Journal of Optical Technology, Vol. 77, Issue 4, pp. 280-283 (2010)
http://dx.doi.org/10.1364/JOT.77.000280


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Abstract

This paper proposes a method of diffraction monitoring based on illuminating the test object with a pair of wave fronts propagating at an angle to each other. It is established that such illumination results in the formation of a moiré pattern whose form is associated with the geometrical parameters of the test object. The possibility of using this method to monitor the thickness of objects is considered.

© 2010 Optical Society of America

Citation
V. N. Nazarov and A. N. Ivanov, "Using the moiré effect to create high-accuracy diffraction systems for monitoring the geometrical parameters of objects," J. Opt. Technol. 77, 280-283 (2010)
http://www.opticsinfobase.org/jot/abstract.cfm?URI=jot-77-4-280


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References

  1. V. N. Nazarov and A. N. Ivanov, “Using the moiré effect to increase the accuracy of diffraction methods for monitoring the geometrical parameters and the spatial position of objects,” Opt. Zh. 76, No. 1, 46 (2009) V. N. Nazarov and A. N. Ivanov,[J. Opt. Technol. 76, 39 (2009)].
  2. A. N. Ivanov and V. N. Nazarov, “Diffraction test method based a mirror aperture,” Izv. Vyssh. Uchebn. Zaved. Prib. 50, No. 4, 38 (2007).
  3. Yu. V. Chuguĭ, “Determining the geometrical parameters of extended objects of constant thickness from their diffraction patterns,” Avtometriya No. 6, 76 (1991).
  4. Yu. A. Lemeshko and Yu. V. Chuguĭ, “Dimensional monitoring of circular reflecting cylinders by an interference method,” Avtometriya 39, No. 5, 42 (2003).
  5. K. A. Zebreva and Yu. V. Chuguĭ, “Calculating diffraction effects on 3D objects of constant thickness with various illumination configurations,” in Papers of the Seventh International Conference on Applied Optics-2006, St. Petersburg, 2006, vol. 3, pp. 236-267.

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