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Determining the topography of the birefringence in fluorite crystals and a study of how it affects the image quality of photolithographic projection systems

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Abstract

This paper discusses apparatus for measuring the characteristics of the residual birefringence of large optical crystals of fluorite by the method of crossed polarizing sheets. A mathematical model of the proposed method is presented. The point-spread function, which describes the influence of birefringence on the image quality, is analyzed.

© 2011 OSA

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