This paper presents the results of using vacuum ultraviolet excilamps based on the excited inert-gas dimers Xe2* (172 nm), Kr2* (146 nm), and Ar2* (126 nm) in scientific research and commercial practice—namely, in illumination engineering and analytical instrumentation, for the creation of new optical materials, photochemistry, and the modification of surface properties.
© 2012 OSA
Original Manuscript: March 23, 2012
Published: October 31, 2012
E. A. Sosnin, "Areas in which vacuum ultraviolet excilamps are used (Review)," J. Opt. Technol. 79, 659-666 (2012)