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Journal of Optical Technology

Journal of Optical Technology

| SIMULTANEOUS RUSSIAN-ENGLISH PUBLICATION

  • Vol. 79, Iss. 12 — Dec. 1, 2012
  • pp: 799–801

The quality of an optical surface processed using polyurethane

G. N. Vishnyakov and I. Yu. Tsel’mina  »View Author Affiliations


Journal of Optical Technology, Vol. 79, Issue 12, pp. 799-801 (2012)
http://dx.doi.org/10.1364/JOT.79.000799


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Abstract

This paper presents the results of a study of the optical surface quality of items processed using three types of polyurethane at the polishing stage by means of multi-workpiece processing. These are compared with the results of processing the optical surfaces of items by the standard technology (on resin). This type of polishing wheels is shown to be effective for achieving the lowest roughness, the minimum deviation of the shape of the surface profile, and the minimum local error of the surface shape. The use of polyurethanes makes it possible to obtain items processed on a block with small scatter in the PV and RMS parameters and increases the percentage yield of finished items with respect to optical purity.

© 2012 OSA

History
Original Manuscript: February 28, 2012
Published: December 31, 2012

Citation
G. N. Vishnyakov and I. Yu. Tsel’mina, "The quality of an optical surface processed using polyurethane," J. Opt. Technol. 79, 799-801 (2012)
http://www.opticsinfobase.org/jot/abstract.cfm?URI=jot-79-12-799


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References

  1. A. A. Tesar and B. A. Fuchs, “Removal rates of fused silica with cerium oxide/pitch polishing,” Proc. SPIE 1531, 80 (1991). [CrossRef]
  2. M. J. Cumbo, “Chemo-mechanical interactions in optical polishing,” Ph.D. Dissertation, Univ. of Rochester, Rochester, N.Y., 1993.
  3. J. E. DeGroote, S. D. Jacobs, L. L. Gregg, and A. E. Marino, “Quantitative characterization of optical polishing pitch,” Proc. SPIE 4451, 209 (2001). [CrossRef]
  4. R. R. Berggren and R. A. Schmell, “Pad polishing for rapid production of large flats,” Proc. SPIE 3134, 252 (1997). [CrossRef]
  5. Y. Li, J. Hou, Q. Xu, J. Wang, W. Yang, and Y. Guo, “The characteristics of optics polished with a polyurethane pad,” Opt. Express 16, No. 14, 10285 (2008). [CrossRef] [PubMed]
  6. L. M. Cook, “Chemical process in glass polishing,” J. Non-Cryst. Solids 120, 152 (1990). [CrossRef]
  7. H. Lu, B. Fookes, Y. Obeng, S. Machinski, and K. A. Richardson, “Quantitative analysis of physical and chemical changes in CMP polyurethane pad surfaces,” Mater. Charact. 49, 35 (2002). [CrossRef]
  8. T. Kamimura, S. Akamatsu, M. Yamamoto, I. Yamato, H. Shiba, S. Motokoshi, T. Sakamoto, T. Okamoto, and K. Yoshida, “Enhancement of surface-damage resistance by removing a subsurface damage in fused silica,” Proc. SPIE 5273, 244 (2004). [CrossRef]
  9. L. S. Ramanathan, S. Sivam, and M. K. Mishrara, “Polyurethane,” in Polymer Data Handbook, J. E. Mark, ed. (Oxford Univ. Press, 1999).

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