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Journal of Optical Technology

Journal of Optical Technology

| SIMULTANEOUS RUSSIAN-ENGLISH PUBLICATION

  • Vol. 79, Iss. 8 — Aug. 31, 2012
  • pp: 512–514

Capacitive-discharge VUV lamp based on a water-vapor–argon mixture

A. K. Shuaibov, A. I. Minya, Z. T. Gomoki, I. V. Shevera, and R. V. Gritsak  »View Author Affiliations


Journal of Optical Technology, Vol. 79, Issue 8, pp. 512-514 (2012)
http://dx.doi.org/10.1364/JOT.79.000512


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Abstract

This paper presents the results of a study of the spectral characteristics of the plasma radiation (175–200 nm) of a pulse-periodic capacitive-discharge lamp that operates with a mixture of water vapor and argon. It is shown that capacitive discharge at low argon pressure is a broad-band source of vacuum ultraviolet radiation. The intensity of the emission bands of the capacitive-discharge plasma is optimized as a function of the partial pressures of argon and water vapor. The electron kinetic coefficients are calculated for a discharge in a mixture of argon and water vapor.

© 2012 OSA

History
Original Manuscript: March 11, 2012
Published: August 31, 2012

Citation
A. K. Shuaibov, A. I. Minya, Z. T. Gomoki, I. V. Shevera, and R. V. Gritsak, "Capacitive-discharge VUV lamp based on a water-vapor–argon mixture," J. Opt. Technol. 79, 512-514 (2012)
http://www.opticsinfobase.org/jot/abstract.cfm?URI=jot-79-8-512


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References

  1. A. Ya. Vul’, S. V. Kidalov, V. M. Milenin, N. M. Timofeev, and M. A. Khodorkovs’ki?, “Investigation of a glow discharge in a mixture of Ar and OH,” Pis’ma Zh. Tekh. Fiz. 25, No. 8, 62 (1999). [Tech. Phys. Lett. 25, 321 (1999)].
  2. A. Ya. Vul’, S. V. Kidalov, V. M. Milenin, N. M. Timofeev, and M. A. Khodorkovs’ki?, “New efficient low-pressure gas-discharge source of optical radiation using hydroxyl OH,” Pis’ma Zh. Tekh. Fiz. 25, No. 1, 10 (1999). [Tech. Phys. Lett. 25, 4 (1999)].
  3. A. K. Shuaibov, L. L. Shimon, A. I. Dashchenko, and I. V. Shevera, “A water-vapor electric-discharge vacuum ultraviolet source,” Pis’ma Zh. Tekh. Fiz. 27, No. 8, 46 (2001). [Tech. Phys. Lett. 27, 642 (2001)].
  4. A. K. Shuaibov, A. I. Minya, A. N. Malinin, Z. T. Gomoki, and R. V. Gritsak, “A VUV lamp with pumping by a capacitive discharge based on mixtures of inert gases with water molecules,” Zh. Prikl. Spektrosk. 78, 927 (2011).
  5. http://siglo-kinema.com/bolsig.htm.

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