Abstract
No abstract available.
PDF ArticleMore Like This
Determination of refractive index and thickness of thick transparent films by variable-angle spectroscopic ellipsometry: application to benzocyclobutene films
Shuwen Guo, Göran Gustafsson, Olle Jonny Hagel, and Hans Arwin
Appl. Opt. 35(10) 1693-1699 (1996)
Numerical algorithm for spectroscopic ellipsometry of thick transparent films
Salvador Bosch, Julio Pérez, and Adolf Canillas
Appl. Opt. 37(7) 1177-1179 (1998)
Determination of refractive index and layer thickness of nm-thin films via ellipsometry
Peter Nestler and Christiane A. Helm
Opt. Express 25(22) 27077-27085 (2017)