This paper discusses the possibility of obtaining one-dimensional photonic crystals based on a system of periodically etched channels in Si <110>. The characteristic matrix method is used to calculate their reflection spectra, which display wide secondary maxima along with the fundamental photon zone. Structures have been fabricated with a period of 4Ã¢Â€Â“16 um, and their reflection spectra have been studied. It is shown that the experimental spectra coincide with the calculated values in the measurement region of Lambda= 2Ã¢Â€Â“16 um.
V. A. Tolmachev, E. V. Astrova, L. S. Granitsyna, and A. D. Remenyuk, "Construction, fabrication, and investigation of the reflection spectra of one-dimensional photonic crystals obtained by means of vertical anisotropic etching of silicon," J. Opt. Technol. 70, 125-129 (2003)