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Journal of Optical Technology

Journal of Optical Technology

| SIMULTANEOUS RUSSIAN-ENGLISH PUBLICATION

  • Vol. 70, Iss. 2 — Feb. 1, 2003
  • pp: 125–129

Construction, fabrication, and investigation of the reflection spectra of one-dimensional photonic crystals obtained by means of vertical anisotropic etching of silicon

V. A. Tolmachev, E. V. Astrova, L. S. Granitsyna, and A. D. Remenyuk

Journal of Optical Technology, Vol. 70, Issue 2, pp. 125-129 (2003)
http://dx.doi.org/10.1364/JOT.70.000125


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Abstract

This paper discusses the possibility of obtaining one-dimensional photonic crystals based on a system of periodically etched channels in Si <110>. The characteristic matrix method is used to calculate their reflection spectra, which display wide secondary maxima along with the fundamental photon zone. Structures have been fabricated with a period of 4–16 um, and their reflection spectra have been studied. It is shown that the experimental spectra coincide with the calculated values in the measurement region of Lambda= 2–16 um.

Citation
V. A. Tolmachev, E. V. Astrova, L. S. Granitsyna, and A. D. Remenyuk, "Construction, fabrication, and investigation of the reflection spectra of one-dimensional photonic crystals obtained by means of vertical anisotropic etching of silicon," J. Opt. Technol. 70, 125-129 (2003)
http://www.opticsinfobase.org/jot/abstract.cfm?URI=jot-70-2-125

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